Area-Selective Atomic Layer Deposition Using Si Precursors as Inhibitors

Rizwan Khan, Bonggeun Shong, Byeong Guk Ko, Jae Kwang Lee, Hyunsoo Lee, Jeong Young Park, Il Kwon Oh, Shimeles Shumi Raya, Hyun Min Hong, Kwun Bum Chung, Erik J. Luber, Yoon Seok Kim, Chul Ho Lee, Woo Hee Kim, Han Bo Ram Lee

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science