Atomic layer deposition of yttria-stabilized zirconia for solid oxide fuel cells

Joon Hyung Shim, Cheng Chieh Chao, Hong Huango, Fritz B. Prinz

Research output: Contribution to journalArticle

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Abstract

Yttria-stabilized zirconia (YSZ) films were synthesized by atomic layer deposition (ALD). Tetrakis-(dimethylamido)zirconium and tris(methylcyclopentadienyl)yttrium were used as ALD precursors with distilled water as oxidant. From X-ray photoelectron spectroscopy (XPS) compositional analysis, the yttria content was identified to increase proportionally to the pulse ratio of Y/Zr. Accordingly, the target stoichiometry ZrO 2/Y 2O 3 = 0.92:0.08 was achieved. Crystal and grain structures of ALD YSZ films grown on amorphous Si 3N 4 were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM). The microstructure of the polycrystalline films consisted of grains of tens of nanometers in diameter. To evaluate ALD YSZ films as oxide ion conductor, freestanding 60 nm films were prepared with porous platinum electrodes on both sides of the electrolyte. This structure served as a solid oxide fuel cell designed to operate at low temperatures. Maximum power densities of 28 mW/cm 2, 66 mW/cm 2, and 270 mW/cm 2 were observed at 265°C, 300°C, and 350°C, respectively. The high performance of thin film ALD electrolyte fuel cells is related to low electrolyte resistance and fast electrode kinetics. The exchange current density at the electrode-electrolyte interface was approximately 4 orders of magnitude higher compared to reference Pt-YSZ values.

Original languageEnglish
Pages (from-to)3850-3854
Number of pages5
JournalChemistry of Materials
Volume19
Issue number15
DOIs
Publication statusPublished - 2007 Jul 24
Externally publishedYes

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Atomic layer deposition
Yttria stabilized zirconia
Solid oxide fuel cells (SOFC)
Electrolytes
Electrodes
Yttrium
Yttrium oxide
Crystal microstructure
Platinum
Oxidants
Zirconium
Stoichiometry
Oxides
Fuel cells
Atomic force microscopy
Ion exchange
Current density
X ray photoelectron spectroscopy
Crystal structure
Ions

ASJC Scopus subject areas

  • Materials Chemistry
  • Materials Science(all)

Cite this

Atomic layer deposition of yttria-stabilized zirconia for solid oxide fuel cells. / Shim, Joon Hyung; Chao, Cheng Chieh; Huango, Hong; Prinz, Fritz B.

In: Chemistry of Materials, Vol. 19, No. 15, 24.07.2007, p. 3850-3854.

Research output: Contribution to journalArticle

Shim, Joon Hyung ; Chao, Cheng Chieh ; Huango, Hong ; Prinz, Fritz B. / Atomic layer deposition of yttria-stabilized zirconia for solid oxide fuel cells. In: Chemistry of Materials. 2007 ; Vol. 19, No. 15. pp. 3850-3854.
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