Abstract
Yttria-stabilized zirconia (YSZ) films were synthesized by atomic layer deposition (ALD). Tetrakis-(dimethylamido)zirconium and tris(methylcyclopentadienyl)yttrium were used as ALD precursors with distilled water as oxidant. From X-ray photoelectron spectroscopy (XPS) compositional analysis, the yttria content was identified to increase proportionally to the pulse ratio of Y/Zr. Accordingly, the target stoichiometry ZrO 2/Y 2O 3 = 0.92:0.08 was achieved. Crystal and grain structures of ALD YSZ films grown on amorphous Si 3N 4 were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM). The microstructure of the polycrystalline films consisted of grains of tens of nanometers in diameter. To evaluate ALD YSZ films as oxide ion conductor, freestanding 60 nm films were prepared with porous platinum electrodes on both sides of the electrolyte. This structure served as a solid oxide fuel cell designed to operate at low temperatures. Maximum power densities of 28 mW/cm 2, 66 mW/cm 2, and 270 mW/cm 2 were observed at 265°C, 300°C, and 350°C, respectively. The high performance of thin film ALD electrolyte fuel cells is related to low electrolyte resistance and fast electrode kinetics. The exchange current density at the electrode-electrolyte interface was approximately 4 orders of magnitude higher compared to reference Pt-YSZ values.
| Original language | English |
|---|---|
| Pages (from-to) | 3850-3854 |
| Number of pages | 5 |
| Journal | Chemistry of Materials |
| Volume | 19 |
| Issue number | 15 |
| DOIs | |
| Publication status | Published - 2007 Jul 24 |
| Externally published | Yes |
Fingerprint
ASJC Scopus subject areas
- Materials Chemistry
- Materials Science(all)
Cite this
Atomic layer deposition of yttria-stabilized zirconia for solid oxide fuel cells. / Shim, Joon Hyung; Chao, Cheng Chieh; Huango, Hong; Prinz, Fritz B.
In: Chemistry of Materials, Vol. 19, No. 15, 24.07.2007, p. 3850-3854.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Atomic layer deposition of yttria-stabilized zirconia for solid oxide fuel cells
AU - Shim, Joon Hyung
AU - Chao, Cheng Chieh
AU - Huango, Hong
AU - Prinz, Fritz B.
PY - 2007/7/24
Y1 - 2007/7/24
N2 - Yttria-stabilized zirconia (YSZ) films were synthesized by atomic layer deposition (ALD). Tetrakis-(dimethylamido)zirconium and tris(methylcyclopentadienyl)yttrium were used as ALD precursors with distilled water as oxidant. From X-ray photoelectron spectroscopy (XPS) compositional analysis, the yttria content was identified to increase proportionally to the pulse ratio of Y/Zr. Accordingly, the target stoichiometry ZrO 2/Y 2O 3 = 0.92:0.08 was achieved. Crystal and grain structures of ALD YSZ films grown on amorphous Si 3N 4 were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM). The microstructure of the polycrystalline films consisted of grains of tens of nanometers in diameter. To evaluate ALD YSZ films as oxide ion conductor, freestanding 60 nm films were prepared with porous platinum electrodes on both sides of the electrolyte. This structure served as a solid oxide fuel cell designed to operate at low temperatures. Maximum power densities of 28 mW/cm 2, 66 mW/cm 2, and 270 mW/cm 2 were observed at 265°C, 300°C, and 350°C, respectively. The high performance of thin film ALD electrolyte fuel cells is related to low electrolyte resistance and fast electrode kinetics. The exchange current density at the electrode-electrolyte interface was approximately 4 orders of magnitude higher compared to reference Pt-YSZ values.
AB - Yttria-stabilized zirconia (YSZ) films were synthesized by atomic layer deposition (ALD). Tetrakis-(dimethylamido)zirconium and tris(methylcyclopentadienyl)yttrium were used as ALD precursors with distilled water as oxidant. From X-ray photoelectron spectroscopy (XPS) compositional analysis, the yttria content was identified to increase proportionally to the pulse ratio of Y/Zr. Accordingly, the target stoichiometry ZrO 2/Y 2O 3 = 0.92:0.08 was achieved. Crystal and grain structures of ALD YSZ films grown on amorphous Si 3N 4 were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM). The microstructure of the polycrystalline films consisted of grains of tens of nanometers in diameter. To evaluate ALD YSZ films as oxide ion conductor, freestanding 60 nm films were prepared with porous platinum electrodes on both sides of the electrolyte. This structure served as a solid oxide fuel cell designed to operate at low temperatures. Maximum power densities of 28 mW/cm 2, 66 mW/cm 2, and 270 mW/cm 2 were observed at 265°C, 300°C, and 350°C, respectively. The high performance of thin film ALD electrolyte fuel cells is related to low electrolyte resistance and fast electrode kinetics. The exchange current density at the electrode-electrolyte interface was approximately 4 orders of magnitude higher compared to reference Pt-YSZ values.
UR - http://www.scopus.com/inward/record.url?scp=34547653583&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34547653583&partnerID=8YFLogxK
U2 - 10.1021/cm070913t
DO - 10.1021/cm070913t
M3 - Article
AN - SCOPUS:34547653583
VL - 19
SP - 3850
EP - 3854
JO - Chemistry of Materials
JF - Chemistry of Materials
SN - 0897-4756
IS - 15
ER -