BaTiO 3 Doped Na 0.5K 0.5Nbo 3 thin films deposited by using eclipse shutter enhanced pulsed laser deposition method

J. S. Choi, L. R. Hwang, S. H. Hong, G. T. Oh, J. A. Choi, S. H. Jeon, S. O. Kang, Vadim Sh Yalishev, B. H. Park, Chang Hak Choi, Cheol Woo Ann, Sahn Nahm, Sang Jun Ann

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2 Citations (Scopus)


We have investigated structural, electrical, and electro-mechanical properties of lead-free piezoelectric BaTi0 3 doped Na 0.5K 0.5Nb-O 3 (BTO-NKN) thin films deposited by pulsed laser deposition (PLD) methods. BTO-NKN thin films have been deposited on La 0.5Sr 0.5Co0 3 (LSCO) bottom electrodes with LaAI0 3 (LAO) substrates. X-ray diffraction data have shown that all the BTO-NKN and bottom electrodes are highly oriented with their c-axes normal to the substrates. In order to improve the morphology of BTO-NKN thin films, we have located an eclipse shutter between a target and a substrate. Root-mean-square roughness was changed from 91 nm to 21 nm with eclipse shutter enhanced PLD (E-PLD) method. Furthermore, the enhanced surface morphology leads to the improvement in electrical or electro-mechanical properties mainly due to increased density. Typical capacitance and d 33 values of a BTO-NKN film deposited by E-PLD method are 1000 pF and 30 pnW, respectively.

Original languageEnglish
Pages (from-to)7354-7358
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Issue number12
Publication statusPublished - 2009 Dec


  • Eclipse method
  • Lead-free piezoelectric
  • Pld
  • Thin film

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics


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