BCl3-Based Dry Etching of Exfoliated (100) -Ga2O3 Flakes

Chemical Compounds

• Flake Like Crystal 72%
• Etching 61%
• Surface 21%
• Dangling Bond 12%
• Crystal Orientation 12%
• Exfoliation 10%
• Inductively Coupled Plasma 9%
• Single Crystalline Solid 6%
• Chemistry 5%
• Gas 5%

Engineering & Materials Science

• Dry etching 100%
• Dangling bonds 20%
• Inductively coupled plasma 17%
• Plasma etching 17%
• Crystal orientation 15%
• Single crystals 13%
• Surface morphology 12%
• Surface roughness 9%
• Gases 6%