Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery

H. Y. Park, Seong Rae Lee, Y. J. Lee, B. W. Cho, W. I. Cho

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

LiCoO2 thin films, which could be used as a cathode material in microbatteries, have been deposited by radio-frequency (rf) magnetron sputtering with various substrate biases as process parameter. The substrate bias during deposition has influenced the electrochemical properties of thin film electrode, and it could be found by charge-discharge test and cyclic voltammogram. We could obtain LiCoO2 thin film cathodes, which can be used directly, without annealing, for the complete thin film battery. The variations of electrochemical properties with substrate bias are related to micro-structural changes due to the ion bombardment, which delivers energy to the growing film. The bias sputtering of LiCoO2 is suggested as the promising method to fabricate thin film microbatteries.

Original languageEnglish
Pages (from-to)70-78
Number of pages9
JournalMaterials Chemistry and Physics
Volume93
Issue number1
DOIs
Publication statusPublished - 2005 Sep 15

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Sputtering
Cathodes
cathodes
sputtering
Thin films
thin films
Electrochemical properties
Substrates
Film growth
Ion bombardment
Magnetron sputtering
electric batteries
bombardment
radio frequencies
magnetron sputtering
Annealing
Electrodes
annealing
electrodes
ions

ASJC Scopus subject areas

  • Materials Chemistry

Cite this

Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery. / Park, H. Y.; Lee, Seong Rae; Lee, Y. J.; Cho, B. W.; Cho, W. I.

In: Materials Chemistry and Physics, Vol. 93, No. 1, 15.09.2005, p. 70-78.

Research output: Contribution to journalArticle

Park, H. Y. ; Lee, Seong Rae ; Lee, Y. J. ; Cho, B. W. ; Cho, W. I. / Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery. In: Materials Chemistry and Physics. 2005 ; Vol. 93, No. 1. pp. 70-78.
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