Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

Jea Shik Shin, Insang Song, Moon Chul Lee, Chul Soo Kim, Sang Uk Son, Duck Hwan Kim, Ho Soo Park, Jing Cui, Yujie Ai, Sungwoo Hwang, Jae Sung Rieh

Research output: Contribution to journalArticle

Abstract

A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Qa) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04 dB and effective electro-mechanical coupling coefficient (kt2), which is essential to achieve wide band-width of RF filters, is 6.54%.

Original languageEnglish
Article number20130938
Journalieice electronics express
Volume11
Issue number6
DOIs
Publication statusPublished - 2014 Mar 6

Keywords

  • BAW
  • FBAR
  • Q-factors
  • RF resonator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Shin, J. S., Song, I., Lee, M. C., Kim, C. S., Son, S. U., Kim, D. H., Park, H. S., Cui, J., Ai, Y., Hwang, S., & Rieh, J. S. (2014). Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure. ieice electronics express, 11(6), [20130938]. https://doi.org/10.1587/elex.11.20130938