Bulk acoustic wave resonators of low lateral energy leakage using air edge reflector

Jea Shik Shin, Insang Song, Moonchul Lee, Hosoo Park, Sang Uk Son, Chul Soo Kim, Duck Hwan Kim, Jing Cui, Sung Woo Hwang, Jae-Sung Rieh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A novel bulk acoustic wave (BAW) resonator structure with air edge reflectors is proposed. The air reflectors provided at the border of the resonator suppress the acoustic wave leakage travelling in lateral direction. The difference of acoustic impedance at the air edge interface is so large that the reflectivity is almost unity which indicates perfect reflection. As a result of optimized lateral structure, the Q-factor at antiresonance frequency (Qa) is improved significantly to 2740. Furthermore, the effective electro-mechanical coupling coefficient (kt 2) which is essential to achieve wide band-width of RF filters is increased considerably by 14%. We also perform multi-physics simulation and investigate the effect of the lateral wave leakage for the BAW structures.

Original languageEnglish
Title of host publicationIEEE MTT-S International Microwave Symposium Digest
DOIs
Publication statusPublished - 2012 Oct 3
Event2012 IEEE MTT-S International Microwave Symposium, IMS 2012 - Montreal, QC, Canada
Duration: 2012 Jun 172012 Jun 22

Other

Other2012 IEEE MTT-S International Microwave Symposium, IMS 2012
CountryCanada
CityMontreal, QC
Period12/6/1712/6/22

Keywords

  • Acoustic devices
  • Film bulk acoustic wave resonator
  • Microelectromechanical devices
  • Rf filters

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Radiation
  • Condensed Matter Physics

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  • Cite this

    Shin, J. S., Song, I., Lee, M., Park, H., Son, S. U., Kim, C. S., Kim, D. H., Cui, J., Hwang, S. W., & Rieh, J-S. (2012). Bulk acoustic wave resonators of low lateral energy leakage using air edge reflector. In IEEE MTT-S International Microwave Symposium Digest [6259499] https://doi.org/10.1109/MWSYM.2012.6259499