Capacitive absolute pressure sensor with vacuum cavity formed by bonding silicon to SOI wafer for upper air observations

K. R. Lee, K. Kim, Y. K. Kim, H. D. Park, S. W. Choi, W. B. Choi, B. K. Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science