Characteristics of 2-inch DLC coated Si FEAs panel

Sanjo Lee, Byeong Kwon Ju, Ho Kwan Kang, Sung Moon, Yun-Hi Lee, Myung Hwan Oh, D. Jeon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.

Original languageEnglish
Title of host publicationSID Conference Record of the International Display Research Conference
Editors Anon
PublisherSID
Pages374-377
Number of pages4
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 17th Annual International Display Research Conference - Toronto, Can
Duration: 1997 Sep 151997 Sep 19

Other

OtherProceedings of the 1997 17th Annual International Display Research Conference
CityToronto, Can
Period97/9/1597/9/19

Fingerprint

Diamonds
Finite element method
Diamond like carbon films
Carbon
Plasmas
Silicon
Coatings
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Lee, S., Ju, B. K., Kang, H. K., Moon, S., Lee, Y-H., Oh, M. H., & Jeon, D. (1997). Characteristics of 2-inch DLC coated Si FEAs panel. In Anon (Ed.), SID Conference Record of the International Display Research Conference (pp. 374-377). SID.

Characteristics of 2-inch DLC coated Si FEAs panel. / Lee, Sanjo; Ju, Byeong Kwon; Kang, Ho Kwan; Moon, Sung; Lee, Yun-Hi; Oh, Myung Hwan; Jeon, D.

SID Conference Record of the International Display Research Conference. ed. / Anon. SID, 1997. p. 374-377.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lee, S, Ju, BK, Kang, HK, Moon, S, Lee, Y-H, Oh, MH & Jeon, D 1997, Characteristics of 2-inch DLC coated Si FEAs panel. in Anon (ed.), SID Conference Record of the International Display Research Conference. SID, pp. 374-377, Proceedings of the 1997 17th Annual International Display Research Conference, Toronto, Can, 97/9/15.
Lee S, Ju BK, Kang HK, Moon S, Lee Y-H, Oh MH et al. Characteristics of 2-inch DLC coated Si FEAs panel. In Anon, editor, SID Conference Record of the International Display Research Conference. SID. 1997. p. 374-377
Lee, Sanjo ; Ju, Byeong Kwon ; Kang, Ho Kwan ; Moon, Sung ; Lee, Yun-Hi ; Oh, Myung Hwan ; Jeon, D. / Characteristics of 2-inch DLC coated Si FEAs panel. SID Conference Record of the International Display Research Conference. editor / Anon. SID, 1997. pp. 374-377
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