Characteristics of 2-inch DLC coated Si FEAs panel

Sanjo Lee, Byeong Kwon Ju, Ho Kwan Kang, Sung Moon, Yun Hi Lee, Myung Hwan Oh, D. Jeon

Research output: Contribution to journalConference article

Abstract

We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.

Original languageEnglish
Pages (from-to)374-377
Number of pages4
JournalSID Conference Record of the International Display Research Conference
Publication statusPublished - 1997
EventProceedings of the 1997 17th Annual International Display Research Conference - Toronto, Can
Duration: 1997 Sep 151997 Sep 19

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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