Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid

Kyung Woon Lee, Jinsik Kim, Dong Ho Lee, Myung Sic Chae, Kyo Seon Hwang, Jung Ho Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


We present the basic characteristics of amplitude modulation cantilever with optical waveguide in liquid. This optical waveguide cantilever-based transducer can be used for small particle detection or biological sensing in liquid environments. Essentially, the SiON waveguide embedded in the SiO2 cantilever is designed and fabricated to detect the biomolecular interaction or small particle in the liquid. For a measurement, the actuation based on amplitude modulation is applied for a stable oscillation of the cantilever in liquid environment. Finally, modulated output signal of optical waveguide cantilever were measured and analyzed.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XVI
EditorsWibool Piyawattanametha, Yong-Hwa Park
ISBN (Electronic)9781510606739
Publication statusPublished - 2017
EventMOEMS and Miniaturized Systems XVI 2017 - San Francisco, United States
Duration: 2017 Jan 302017 Feb 1

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherMOEMS and Miniaturized Systems XVI 2017
Country/TerritoryUnited States
CitySan Francisco


  • Mechanical transducer
  • amplitude modulation
  • cantilever
  • optical cantilever

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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