@inproceedings{30d1951781354171b5685e7316143646,
title = "Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid",
abstract = "We present the basic characteristics of amplitude modulation cantilever with optical waveguide in liquid. This optical waveguide cantilever-based transducer can be used for small particle detection or biological sensing in liquid environments. Essentially, the SiON waveguide embedded in the SiO2 cantilever is designed and fabricated to detect the biomolecular interaction or small particle in the liquid. For a measurement, the actuation based on amplitude modulation is applied for a stable oscillation of the cantilever in liquid environment. Finally, modulated output signal of optical waveguide cantilever were measured and analyzed.",
keywords = "Mechanical transducer, amplitude modulation, cantilever, optical cantilever",
author = "Lee, {Kyung Woon} and Jinsik Kim and Lee, {Dong Ho} and Chae, {Myung Sic} and Hwang, {Kyo Seon} and Park, {Jung Ho}",
note = "Publisher Copyright: {\textcopyright} 2017 SPIE.; MOEMS and Miniaturized Systems XVI 2017 ; Conference date: 30-01-2017 Through 01-02-2017",
year = "2017",
doi = "10.1117/12.2251817",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Wibool Piyawattanametha and Yong-Hwa Park",
booktitle = "MOEMS and Miniaturized Systems XVI",
}