Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid

Kyung Woon Lee, Jinsik Kim, Dong Ho Lee, Myung Sic Chae, Kyo Seon Hwang, Jung ho Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the basic characteristics of amplitude modulation cantilever with optical waveguide in liquid. This optical waveguide cantilever-based transducer can be used for small particle detection or biological sensing in liquid environments. Essentially, the SiON waveguide embedded in the SiO2 cantilever is designed and fabricated to detect the biomolecular interaction or small particle in the liquid. For a measurement, the actuation based on amplitude modulation is applied for a stable oscillation of the cantilever in liquid environment. Finally, modulated output signal of optical waveguide cantilever were measured and analyzed.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XVI
PublisherSPIE
Volume10116
ISBN (Electronic)9781510606739
DOIs
Publication statusPublished - 2017
EventMOEMS and Miniaturized Systems XVI 2017 - San Francisco, United States
Duration: 2017 Jan 302017 Feb 1

Other

OtherMOEMS and Miniaturized Systems XVI 2017
CountryUnited States
CitySan Francisco
Period17/1/3017/2/1

    Fingerprint

Keywords

  • amplitude modulation
  • cantilever
  • Mechanical transducer
  • optical cantilever

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Lee, K. W., Kim, J., Lee, D. H., Chae, M. S., Hwang, K. S., & Park, J. H. (2017). Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid. In MOEMS and Miniaturized Systems XVI (Vol. 10116). [101160P] SPIE. https://doi.org/10.1117/12.2251817