Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias

Joong Kee Lee, Hyungduk Ko, Jin Hyun, Dong Jin Byun, Byung Won Cho, Dalkeun Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Cu/C films were prepared at room temperature under Cu(hfac) 2-Ar-H 2 atmosphere in order to obtain metallized polymer by using ECR-MOCVD (Electron Cyclotron Resonance Metal Organic Chemical Vapor Deposition) coupled with periodic DC bias system. Room temperature MOCVD was possible when periodic negative voltage was applied on the polymer substrate. The periodic negative voltage induces ions and radicals to have nucleation reaction on the surface of the substrate. Formation of Cu/C films strongly depends on the periodic negative pattern of DC bias and the electric sheet resistance of the films was controlled from 10 8 to 10 0 ohm/sq ranges by process parameters such as microwave power and magnet current. The increase in microwave power and magnet current brought on copper-rich film formation with low electric resistance. On the other hand carbon-rich films with high sheet electric resistance were prepared with decreased values for process parameters aforementioned.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsE. Manias, G.G. Malliaras
Pages339-344
Number of pages6
Volume734
Publication statusPublished - 2003
EventPolymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers - Boston, MA, United States
Duration: 2002 Dec 22002 Dec 6

Other

OtherPolymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers
CountryUnited States
CityBoston, MA
Period02/12/202/12/6

Fingerprint

Organic Chemicals
Electron cyclotron resonance
Organic chemicals
Chemical vapor deposition
Polymers
Metals
Substrates
Magnets
Temperature
Microwaves
Sheet resistance
Metallorganic chemical vapor deposition
Electric potential
Copper
Nucleation
Carbon
Ions

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Lee, J. K., Ko, H., Hyun, J., Byun, D. J., Cho, B. W., & Park, D. (2003). Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias. In E. Manias, & G. G. Malliaras (Eds.), Materials Research Society Symposium - Proceedings (Vol. 734, pp. 339-344)

Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias. / Lee, Joong Kee; Ko, Hyungduk; Hyun, Jin; Byun, Dong Jin; Cho, Byung Won; Park, Dalkeun.

Materials Research Society Symposium - Proceedings. ed. / E. Manias; G.G. Malliaras. Vol. 734 2003. p. 339-344.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lee, JK, Ko, H, Hyun, J, Byun, DJ, Cho, BW & Park, D 2003, Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias. in E Manias & GG Malliaras (eds), Materials Research Society Symposium - Proceedings. vol. 734, pp. 339-344, Polymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers, Boston, MA, United States, 02/12/2.
Lee JK, Ko H, Hyun J, Byun DJ, Cho BW, Park D. Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias. In Manias E, Malliaras GG, editors, Materials Research Society Symposium - Proceedings. Vol. 734. 2003. p. 339-344
Lee, Joong Kee ; Ko, Hyungduk ; Hyun, Jin ; Byun, Dong Jin ; Cho, Byung Won ; Park, Dalkeun. / Characteristics of Cu/C films on polymer substrate prepared by room temperature ECR-MOCVD coupled with periodic DC bias. Materials Research Society Symposium - Proceedings. editor / E. Manias ; G.G. Malliaras. Vol. 734 2003. pp. 339-344
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