Characteristics of fluorine-doped tin oxide thin films on poly ethylene terephthalate (PET) substrate

Yun Ho Kook, Ji Hun Park, Dong Jin Byun, Joong Kee Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Fluorine-doped tin oxide (FTO) films on PET (Polyethylene Terephthalate) substrate were prepared by the electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) under an Ar-O2-H2 atmosphere. The used tin and fluorine precursor are TMT (tetramethyltin) and sulfur hexafluoride (SF6), respectively, The hydrogen content plays an important role to control the optical and electrical characteristics of the films. The HF etching effect was clearly observed with increase of H 2/TMT mole ratio, on the other hand the hydro-carbon deposition increased with decrease of H2/TMT mole ratio. Therefore the optimum H2 content can be determined by the counter balance effect between HF etching and hydro-carbon deposition. The obtained optimum SnO2: F thin films exhibited over 90% of optical transmittance at wavelength range from 380 to 780 nm and c.a. 6×10-3 ohm -cm of electrical resistivity at 1.25 H2/TMT mole ratio.

Original languageEnglish
Title of host publicationEco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design
Pages949-952
Number of pages4
Publication statusPublished - 2007 Dec 1
Event8th International Symposium on Eco-Materials Processing and Design, ISEPD-8 - Kitakyushu, Japan
Duration: 2007 Jan 112007 Jan 13

Publication series

NameMaterials Science Forum
Volume544-545
ISSN (Print)0255-5476

Other

Other8th International Symposium on Eco-Materials Processing and Design, ISEPD-8
CountryJapan
CityKitakyushu
Period07/1/1107/1/13

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Keywords

  • ECR-MOCVD
  • Electrical resistivity
  • F-doped SnO
  • Transmittance

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Kook, Y. H., Park, J. H., Byun, D. J., & Lee, J. K. (2007). Characteristics of fluorine-doped tin oxide thin films on poly ethylene terephthalate (PET) substrate. In Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design (pp. 949-952). (Materials Science Forum; Vol. 544-545).