Characteristics of PMW-PNN-PT-PZ thick films on various bottom electrodes

Sang Jong Kim, Chong Yun Kang, Ji Won Choi, Hyun Jai Kim, Man Young Sung, Seok Jin Yoon

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Characteristics of piezoelectric thick films on various bottom electrodes prepared by screen printing method were investigated. The composition of the ceramics used in this study was 0.01Pb(Mg1/2W1/2)O 3-0.41Pb(Ni1/3Nb2/3)O3-0. 35PbTiO3-0.23PbZrO3 + 0.1wt% Y2O3 +2.0 wt.%ZnO(PMW-PNN-PT-PZ). The Ag and the Ag-Pd electrodes were coated on SiO2/Si substrate by screen printing method and Pt electrode was deposited on Ti/ SiO2/Si substrate by DC sputtering system. The piezoelectric PMW-PNN-PT-PZ thick films were fabricated on each electrode and annealed by rapid thermal annealing (RTA). The PMW-PNN-PT-PZ piezoelectric thick films on Ag/SiO2/Si has higher remanent polarization (P r) of 22.4 μC/cm2.

Original languageEnglish
Pages (from-to)495-498
Number of pages4
JournalJournal of Electroceramics
Volume17
Issue number2-4
DOIs
Publication statusPublished - 2006 Dec

Keywords

  • Piezoelectric
  • Rapid thermal annealing
  • Screen printing method
  • Thick film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering
  • Materials Chemistry

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