Characteristics of rapid-thermal-annealed LiNi1-xCo xO2 cathode films for all-solid-state rechargeable thin film microbatteries

Han Ki Kim, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journalConference articlepeer-review

17 Citations (Scopus)


We report on the characteristics of rapid-thermal-annealed LiNi 1-xCoxO2 cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi 1-xCoxO2 film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi 1-xCoxO2/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 μAh/cm2μm. It is concluded that the LiyNi1-xCoxO2 cathode could represent a promising candidate for a cathode film in TFBs.

Original languageEnglish
Pages (from-to)619-625
Number of pages7
JournalThin Solid Films
Publication statusPublished - 2004 Jan 30
Externally publishedYes
EventProceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States
Duration: 2002 Apr 282002 May 2


  • Capacity
  • Cyclibility
  • LiNiCoO
  • Rapid thermal annealing
  • Thin film microbattery

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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