Characteristics of SnOx-ZnO composite film on Polyethylene Terephalate (PET) substrate prepared by ECR-MOCVD

Ji Hun Park, Dong Jin Byun, Joong Kee Lee

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Zinc oxide and tin oxide (ZnSnOx) films on PET (Polyethylene Terephthalate) substrate were prepared by the electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) under an hydrogen, oxygen and argon atmosphere. The used tin and zinc precursor are TMT (tetramethyltin) and DEZn(diethylzinc), respectively. The metal (Zinc and Tin) oxidation content plays an important role to control the optical and electrical characteristics of the films. Therefore the optimum DEZn/TMT content can be determined by the counter stability effect between oxidation and zinc-tin deposition. The obtained ZnSnOx (or SnOx-ZnO) of high mobility films exhibited c.a. 7.0×10-3 ohm · cm of electrical resistivity.

Original languageEnglish
Pages (from-to)515-518
Number of pages4
JournalAdvanced Materials Research
Volume24-25
Publication statusPublished - 2007 Dec 1

Fingerprint

Electron cyclotron resonance
Organic chemicals
Composite films
Tin
Polyethylenes
Chemical vapor deposition
Zinc
Substrates
Metals
Oxidation
Zinc oxide
Tin oxides
Polyethylene terephthalates
Oxide films
Argon
Hydrogen
Oxygen

Keywords

  • ECR-MOCVD
  • Electrical resistivity
  • SnO-ZnO
  • XPS
  • ZnSnO

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Characteristics of SnOx-ZnO composite film on Polyethylene Terephalate (PET) substrate prepared by ECR-MOCVD. / Park, Ji Hun; Byun, Dong Jin; Lee, Joong Kee.

In: Advanced Materials Research, Vol. 24-25, 01.12.2007, p. 515-518.

Research output: Contribution to journalArticle

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