Characteristics of SnOx-ZnO composite film on Polyethylene Terephalate (PET) substrate prepared by ECR-MOCVD

Ji Hun Park, Dong Jin Byun, Joong Kee Lee

Research output: Contribution to journalConference articlepeer-review


Zinc oxide and tin oxide (ZnSnOx) films on PET (Polyethylene Terephthalate) substrate were prepared by the electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) under an hydrogen, oxygen and argon atmosphere. The used tin and zinc precursor are TMT (tetramethyltin) and DEZn(diethylzinc), respectively. The metal (Zinc and Tin) oxidation content plays an important role to control the optical and electrical characteristics of the films. Therefore the optimum DEZn/TMT content can be determined by the counter stability effect between oxidation and zinc-tin deposition. The obtained ZnSnOx (or SnOx-ZnO) of high mobility films exhibited c.a. 7.0×10-3 ohm · cm of electrical resistivity.

Original languageEnglish
Pages (from-to)515-518
Number of pages4
JournalAdvanced Materials Research
Publication statusPublished - 2007
EventPRICM 6: The 6th Pacific Rim International Conference on Advanced Materials and Processing - Jeju Island, Korea, Republic of
Duration: 2007 Nov 52007 Nov 9


  • Electrical resistivity
  • SnO-ZnO
  • XPS
  • ZnSnO

ASJC Scopus subject areas

  • Engineering(all)


Dive into the research topics of 'Characteristics of SnO<sub>x</sub>-ZnO composite film on Polyethylene Terephalate (PET) substrate prepared by ECR-MOCVD'. Together they form a unique fingerprint.

Cite this