Characterization and Cu electroless plating of laser-drilled through-wafer via-holes in GaN/Al2O3

Jaehui Ahn, Hong Yeol Kim, Hyo Chol Koo, Jae Jeong Kim, Ji Hyun Kim

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

GaN on Al2O3 was drilled with a high power Nd:YAG laser. Micro-Raman spectroscopy showed that the induced damage was nominal at about 15 μm from the edge of the drilled through-wafer via-holes. Cu plating was accomplished using an electroless plating technique. FIB was employed to expose the interface between electrolessly plated Cu and GaN on the sidewall of the drilled holes, followed by SEM/EDX to confirm that the sidewall of the drilled holes was successfully covered with Cu. Cu electroless plating after laser drilling has the potential to simplify device layout and improve device integration.

Original languageEnglish
Pages (from-to)3841-3843
Number of pages3
JournalThin Solid Films
Volume517
Issue number14
DOIs
Publication statusPublished - 2009 May 29

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Keywords

  • Cu plating
  • GaN
  • Laser drilling

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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