Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Sung Ju Tark; Min Gu Kang; Sungeun Park; Seung Hun Lee; Chang Sik Son; Jeong Chul Lee; Donghwan Kim

doi:10.1016/j.cap.2010.08.005

Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Sung Ju Tark, Min Gu Kang, Sungeun Park, Seung Hun Lee, Chang Sik Son, Jeong Chul Lee, Donghwan Kim

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

Original language	English
Pages (from-to)	362-367
Number of pages	6
Journal	Current Applied Physics
Volume	11
Issue number	3
DOIs	https://doi.org/10.1016/j.cap.2010.08.005
Publication status	Published - 2011 May

Keywords

Hydrogenated
RF magnetron sputter
Surface textured
TCO
ZnO:Al

ASJC Scopus subject areas

Materials Science(all)
Physics and Astronomy(all)

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.cap.2010.08.005

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title = "Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications",

abstract = "In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.",

keywords = "Hydrogenated, RF magnetron sputter, Surface textured, TCO, ZnO:Al",

author = "Tark, {Sung Ju} and Kang, {Min Gu} and Sungeun Park and Lee, {Seung Hun} and Son, {Chang Sik} and Lee, {Jeong Chul} and Donghwan Kim",

note = "Funding Information: This work was supported by the New & Renewable Energy of the Korea Institute of Energy Technology Evaluation and Planning(KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20093021010010) . Copyright: Copyright 2011 Elsevier B.V., All rights reserved.",

year = "2011",

month = may,

doi = "10.1016/j.cap.2010.08.005",

language = "English",

volume = "11",

pages = "362--367",

journal = "Current Applied Physics",

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AU - Tark, Sung Ju

AU - Kang, Min Gu

AU - Park, Sungeun

AU - Lee, Seung Hun

AU - Son, Chang Sik

AU - Lee, Jeong Chul

AU - Kim, Donghwan

N1 - Funding Information: This work was supported by the New & Renewable Energy of the Korea Institute of Energy Technology Evaluation and Planning(KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20093021010010) . Copyright: Copyright 2011 Elsevier B.V., All rights reserved.

PY - 2011/5

Y1 - 2011/5

N2 - In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

AB - In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

KW - Hydrogenated

KW - RF magnetron sputter

KW - Surface textured

KW - TCO

KW - ZnO:Al

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Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

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