Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Sung Ju Tark, Min Gu Kang, Sungeun Park, Seung Hun Lee, Chang Sik Son, Jeong Chul Lee, Donghwan Kim

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

Original languageEnglish
Pages (from-to)362-367
Number of pages6
JournalCurrent Applied Physics
Volume11
Issue number3
DOIs
Publication statusPublished - 2011 May 1

Fingerprint

Zinc Oxide
Texturing
Zinc oxide
zinc oxides
Oxide films
Optical properties
optical properties
oxide films
Solar cells
solar cells
Microcrystalline silicon
Thin films
haze
thin films
Quantum efficiency
Magnetron sputtering
Surface morphology
quantum efficiency
Etching
magnetron sputtering

Keywords

  • Hydrogenated
  • RF magnetron sputter
  • Surface textured
  • TCO
  • ZnO:Al

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications. / Tark, Sung Ju; Kang, Min Gu; Park, Sungeun; Lee, Seung Hun; Son, Chang Sik; Lee, Jeong Chul; Kim, Donghwan.

In: Current Applied Physics, Vol. 11, No. 3, 01.05.2011, p. 362-367.

Research output: Contribution to journalArticle

Tark, Sung Ju ; Kang, Min Gu ; Park, Sungeun ; Lee, Seung Hun ; Son, Chang Sik ; Lee, Jeong Chul ; Kim, Donghwan. / Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications. In: Current Applied Physics. 2011 ; Vol. 11, No. 3. pp. 362-367.
@article{4da26ea87eda4402910630e7801ee425,
title = "Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications",
abstract = "In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5{\%}) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81{\%}. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08{\%}.",
keywords = "Hydrogenated, RF magnetron sputter, Surface textured, TCO, ZnO:Al",
author = "Tark, {Sung Ju} and Kang, {Min Gu} and Sungeun Park and Lee, {Seung Hun} and Son, {Chang Sik} and Lee, {Jeong Chul} and Donghwan Kim",
year = "2011",
month = "5",
day = "1",
doi = "10.1016/j.cap.2010.08.005",
language = "English",
volume = "11",
pages = "362--367",
journal = "Current Applied Physics",
issn = "1567-1739",
publisher = "Elsevier",
number = "3",

}

TY - JOUR

T1 - Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

AU - Tark, Sung Ju

AU - Kang, Min Gu

AU - Park, Sungeun

AU - Lee, Seung Hun

AU - Son, Chang Sik

AU - Lee, Jeong Chul

AU - Kim, Donghwan

PY - 2011/5/1

Y1 - 2011/5/1

N2 - In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

AB - In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

KW - Hydrogenated

KW - RF magnetron sputter

KW - Surface textured

KW - TCO

KW - ZnO:Al

UR - http://www.scopus.com/inward/record.url?scp=79951679270&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79951679270&partnerID=8YFLogxK

U2 - 10.1016/j.cap.2010.08.005

DO - 10.1016/j.cap.2010.08.005

M3 - Article

AN - SCOPUS:79951679270

VL - 11

SP - 362

EP - 367

JO - Current Applied Physics

JF - Current Applied Physics

SN - 1567-1739

IS - 3

ER -