Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Sung Ju Tark, Min Gu Kang, Sungeun Park, Seung Hun Lee, Chang Sik Son, Jeong Chul Lee, Donghwan Kim

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11 Citations (Scopus)


In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

Original languageEnglish
Pages (from-to)362-367
Number of pages6
JournalCurrent Applied Physics
Issue number3
Publication statusPublished - 2011 May 1



  • Hydrogenated
  • RF magnetron sputter
  • Surface textured
  • TCO
  • ZnO:Al

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

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