Characterization of thermo-mechanical properties of carbon-based low-dimensional material/metallic thin-film composites from NEMS structures

Myung Rae Cho, Young Duck Kim, Byung Yang Lee, Seunghun Hong, Yun Daniel Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on the direct thermal conductivity measurement of nanoscale nanolaminate material system from metallic thin-film (Al) and carbon-based low-dimensional material (swCNT). Such accurate measurement was made possible by realizing submicron measurement platform using micromaching techniques. Furthermore, by measuring the resonant response of such nanomechanical structures, we are able to deduce their thermal-elastic properties. We find that addition of swCNTs to Al thin-film greatly suppresses the overall coefficient of thermal expansion. On the other hand, addition of swCNTs has marginal effects on the resulting thermal conductivities.

Original languageEnglish
Title of host publicationChemical Sensors 9 -and- MEMS/NEMS 9
Pages263-268
Number of pages6
Edition8
DOIs
Publication statusPublished - 2010
EventChemical Sensors 9: Chemical and Biological Sensors and Analytical Systems and Microfabricated and Nanofabricated Systems for MEMS/NEMS 9 - 218th ECS Meeting - Las Vegas, NV, United States
Duration: 2010 Oct 102010 Oct 15

Publication series

NameECS Transactions
Number8
Volume33
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherChemical Sensors 9: Chemical and Biological Sensors and Analytical Systems and Microfabricated and Nanofabricated Systems for MEMS/NEMS 9 - 218th ECS Meeting
CountryUnited States
CityLas Vegas, NV
Period10/10/1010/10/15

ASJC Scopus subject areas

  • Engineering(all)

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    Cho, M. R., Kim, Y. D., Lee, B. Y., Hong, S., & Park, Y. D. (2010). Characterization of thermo-mechanical properties of carbon-based low-dimensional material/metallic thin-film composites from NEMS structures. In Chemical Sensors 9 -and- MEMS/NEMS 9 (8 ed., pp. 263-268). (ECS Transactions; Vol. 33, No. 8). https://doi.org/10.1149/1.3484130