Charge-Discharge Induced Phase Transformation of RuO2 Electrode for Thin Film Supercapacitor

Han Ki Kim, Tae Yeon Seong, S. M. Lee, Young Soo Yoon

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO 2/LiPON/RuO2 structure clearly demonstrated the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of 'the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor.

Original languageEnglish
Pages (from-to)239-246
Number of pages8
JournalMetals and Materials International
Volume9
Issue number3
Publication statusPublished - 2003 Jun 1
Externally publishedYes

Fingerprint

electrochemical capacitors
phase transformations
Phase transitions
Thin films
Electrodes
electrodes
thin films
transmission electron microscopy
microstructure
Microstructure
Reactive sputtering
High resolution transmission electron microscopy
Surface chemistry
Electrolytes
sputtering
electrolytes
degradation
Transmission electron microscopy
solid state
X ray diffraction

Keywords

  • Cyclibility
  • Glancing angle X-ray diffraction (GXRD)
  • LiPON
  • RuO
  • Supercapacitor
  • Transmission electron microscope (TEM)

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Charge-Discharge Induced Phase Transformation of RuO2 Electrode for Thin Film Supercapacitor. / Kim, Han Ki; Seong, Tae Yeon; Lee, S. M.; Yoon, Young Soo.

In: Metals and Materials International, Vol. 9, No. 3, 01.06.2003, p. 239-246.

Research output: Contribution to journalArticle

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