Chemical vapor deposition of hydrogen-permselective silica films on porous glass supports from tetraethylorthosilicate

Heung Yong Ha, SukWoo Nam, Seong A. Hong, Won Kook Lee

Research output: Contribution to journalArticle

81 Citations (Scopus)

Abstract

Hydrogen-permselective SiO2 films were formed within the pores of glass support tubes by chemical vapor deposition from tetraethylorthosilicate (TEOS). Deposition of SiO2 involved the decomposition of TEOS both in the absence of and in the presence of oxygen at 200-700°C and 1 atm. The properties of the silica films produced were greatly affected by the deposition conditions, the temperature, the contact scheme of reactants, and the amount of SiO2 deposited. In the absence of oxygen, the films produced appeared to be relatively labile and their stabilities were dependent on the deposition conditions. In the presence of oxygen, however, stable and highly H2-selective membranes were synthesized at temperatures above 300°C by one-sided deposition; and unstable films were obtained at high concentration of TEO by opposing-reactant deposition. The permeation rates of H2 at 600°C through the SiO2 membranes were 0.20-0.42 cm3 (STP)/cm2-min-atm and the H2:N2 permeation ratios varied between 500 and 3000. The SiO2 films produced using TEOS and oxygen were less dense than those deposited by SiCl4 hydrolysis. Thus the former membranes had higher H2 permeation rates but had lower H2 selectivity as the pores of the substrate were plugged with SiO2.

Original languageEnglish
Pages (from-to)279-290
Number of pages12
JournalJournal of Membrane Science
Volume85
Issue number3
DOIs
Publication statusPublished - 1993 Dec 2
Externally publishedYes

Fingerprint

Silicon Dioxide
Glass
Hydrogen
Chemical vapor deposition
Silica
vapor deposition
Oxygen
silicon dioxide
Permeation
glass
hydrogen
Membranes
oxygen
membranes
Temperature
porosity
Hydrolysis
hydrolysis
selectivity
tetraethoxysilane

Keywords

  • Chemical vapor deposition
  • Gas permeation
  • Hydrogen separation
  • Silica membranes
  • Tetraethylorthosilicate

ASJC Scopus subject areas

  • Filtration and Separation
  • Polymers and Plastics

Cite this

Chemical vapor deposition of hydrogen-permselective silica films on porous glass supports from tetraethylorthosilicate. / Ha, Heung Yong; Nam, SukWoo; Hong, Seong A.; Lee, Won Kook.

In: Journal of Membrane Science, Vol. 85, No. 3, 02.12.1993, p. 279-290.

Research output: Contribution to journalArticle

Ha, Heung Yong ; Nam, SukWoo ; Hong, Seong A. ; Lee, Won Kook. / Chemical vapor deposition of hydrogen-permselective silica films on porous glass supports from tetraethylorthosilicate. In: Journal of Membrane Science. 1993 ; Vol. 85, No. 3. pp. 279-290.
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