CNT-array integrated SoC for biological sensor applications

Sung Min Seo, Jun Ho Cheon, Jung Hwan Lee, Minbaek Lee, Jiwoon Im, Byung Yang Lee, In Young Chung, Seunghun Hong, Young June Park, Hong Shick Min

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An 8×8 carbon nanotube (CNT) sensor array integrated on top of the CMOS chip is proposed. After the chip is fabricated in standard CMOS process, the CNTs network is formed on top of each sensor cell site of the fabricated chip. When the resistance of the CNT is changed by the chemical reaction, the sensing circuit in the chip measures the charging time of the RC (CNT-Resistor & Capacitor). Finally the information of measured time is converted to a digital code. The CMOS chip was fabricated by Dongbu 0.1 Sum technology and the size of the 8×8 sensor array is 2 mm*2mm. From the electrochemical experiments, the test chip shows the feasibility of sensor for the simultaneous detection of the various chemical reactions.

Original languageEnglish
Title of host publication2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Pages199-200
Number of pages2
Publication statusPublished - 2006
Externally publishedYes
Event2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States
Duration: 2006 May 72006 May 11

Publication series

Name2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Volume2

Other

Other2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
CountryUnited States
CityBoston, MA
Period06/5/706/5/11

Keywords

  • Biological and chemical sensor
  • CMOS technology
  • Carbon nanotubes
  • Sensor array

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Seo, S. M., Cheon, J. H., Lee, J. H., Lee, M., Im, J., Lee, B. Y., Chung, I. Y., Hong, S., Park, Y. J., & Min, H. S. (2006). CNT-array integrated SoC for biological sensor applications. In 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings (pp. 199-200). (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings; Vol. 2).