Co-firing and shrinkage matching of low- and middle- permittivity dielectric compositions for the application to a low-temperature co-fired ceramics system was investigated. Several glass compositions were initially examined for the low-temperature firing of middle-K (K∼20) dielectrics, and their compositions were further modified for shrinkage matching between low-K (K∼6) and middle-K layers. By controlling the processing parameters such as the solid loading ratio and stacking sequence, the warpages between hetero-layers could be minimized.
|Number of pages||6|
|Journal||Journal of the American Ceramic Society|
|Publication status||Published - 2006 Feb|
ASJC Scopus subject areas
- Ceramics and Composites
- Materials Chemistry