Abstract
Porous TiO2 films were prepared by the micro-arc oxidation (MAO) of Ti plates, and their CO sensing properties at low concentrations (5-100 ppm) were investigated as an application for an air quality control sensor. The obtained rutile films exhibited the maximum CO gas response at 350 °C, which is typical for semiconductor-type gas sensors, and the Ra/Rg was ∼1.6 for 10 ppm CO (Ra: resistance in air, Rg: resistance in a sample gas). The magnitude of the gas response increased almost linearly with increasing the CO concentration from 5 to 100 ppm. The CO sensing performance of the TiO2 sensor in the presence of humidity was investigated and compared with that of a SnO2 sensor.
Original language | English |
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Pages (from-to) | 69-73 |
Number of pages | 5 |
Journal | Sensors and Actuators, B: Chemical |
Volume | 120 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2006 Dec 14 |
Keywords
- Air quality control
- CO sensor
- Micro-arc oxidation
- TiO
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry