Combined effects of oxygen pressures and RF powers on the electrical characteristics of ITO-based multilayer transparent electrodes

Hyeong Seop Im, Su Kyung Kim, Tae Ju Lee, Tae Yeon Seong

Research output: Contribution to journalArticle

Abstract

The opto-electrical properties of plasma-treated ITO films were investigated as functions of oxygen pressures (3.33 and 26.66 Pa) and radio-frequency (RF) plasma powers (50 and 150 W). The plasma-treated samples showed higher transmittance than the untreated sample. After the low-oxygen treatment, the carrier concentration increased with increasing plasma RF power and the figure of merit (FOM) also increased from 1.17 × 10−3 to 1.65 × 10−3 Ω−1. This was not the case for the high-oxygen treatment. The ITO surfaces became smoother with increasing RF power. It was shown that unlike the high-oxygen treated samples, the In 3d and Sn 3d core levels for the low-oxygen-treated ITO films were shifted to higher energies compared to that of the untreated sample. ITO films of ITO/Ag/ITO multilayers (IAI) were plasma-treated at different conditions. Their transmittance maxima were in the range of 91.58–92.32% at 492–501 nm. The bottom-ITO-treated sample gave 23.1% higher mobility and 19% lower sheet resistance than the untreated IAI. The wetting characteristics of deionized (DI) water on the ITO films showed that the surface energy of ITO films increased from 34.22 to 71.14 mJ/m2 when the oxygen pressures increased from 0 to 26.66 Pa.

Original languageEnglish
Article number108871
JournalVacuum
Volume169
DOIs
Publication statusPublished - 2019 Nov 1

Fingerprint

ITO (semiconductors)
radio frequencies
Multilayers
Oxygen
Electrodes
electrodes
Plasmas
oxygen
Core levels
Deionized water
Sheet resistance
Interfacial energy
transmittance
Carrier concentration
Wetting
Electric properties
plasma frequencies
figure of merit
wetting
surface energy

Keywords

  • Indium-tin-oxide
  • Multilayer
  • Oxygen plasma treatment
  • Transparent conducting electrode

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Cite this

Combined effects of oxygen pressures and RF powers on the electrical characteristics of ITO-based multilayer transparent electrodes. / Im, Hyeong Seop; Kim, Su Kyung; Lee, Tae Ju; Seong, Tae Yeon.

In: Vacuum, Vol. 169, 108871, 01.11.2019.

Research output: Contribution to journalArticle

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