Comparative study on energy consumption in ateam-humidification- and water-spray-humidification-type outdoor air-conditioning systems for semiconductor manufacturing clean rooms

Hyung Tae Kim, Gen Soo Song, Ki Cheol Kim, Kyung Hoon Yoo, Seung Woo Son, Dae Kun Shin, Dug Jun Park, Oh Myoung Kwon

Research output: Contribution to journalArticle


In modern large-scale semiconductor manufacturing clean rooms, the energy consumed by the outdoor air-conditioning system during heating, humidification, cooling, and dehumidification of the incoming outdoor air represents about 45% of the total air-conditioning load required to maintain a clean-room environment In particular, the energy required for humidification of the outdoor air in winter is very high. Therefore, evaluation and comparison of the energy consumption in key humidification systems, viz., steam-humidification and water-spray-humidification systems, used in outdoor air-conditioning systems would be useful to reduce the outdoor air-conditioning load in clean rooms. In the present study, an experiment with an outdoor air flow of 1000 m 3/h was conducted to compare the air-conditioning process and energy consumption in outdoor air-conditioning systems with electrode-boiler steam humidifiers and air-washer water spray humidification systems. The experimental results showed that the water-spray-humidification-type outdoor air-conditioning system consumed less electrical power than did the steam-humidification-type system and was more energy efficient during winter.

Original languageEnglish
Pages (from-to)1249-1255
Number of pages7
JournalTransactions of the Korean Society of Mechanical Engineers, B
Issue number12
Publication statusPublished - 2011 Dec 1



  • Clean Room
  • Energy Consumption
  • Outdoor Air Conditioning System
  • Power Consumption Per Unit Load
  • Steam Humidification
  • Water Spray Humidification

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this