Comparative study on energy consumption in ateam-humidification- and water-spray-humidification-type outdoor air-conditioning systems for semiconductor manufacturing clean rooms

Hyung Tae Kim, Gen Soo Song, Ki Cheol Kim, Kyung Hoon Yoo, Seung Woo Son, Dae Kun Shin, Dug Jun Park, Oh Myung Kwon

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Engineering & Materials Science