Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing

Seungmoo Lee, Jaihyung Won, Jongsik Choi, Jihun Park, Yeonhong Jee, Hyeondeok Lee, Dongjin Byun

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15 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds