Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing

Seungmoo Lee, Jaihyung Won, Jongsik Choi, Jihun Park, Yeonhong Jee, Hyeondeok Lee, Dongjin Byun

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Fingerprint Dive into the research topics of 'Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing'. Together they form a unique fingerprint.

Chemical Compounds

Physics & Astronomy

Engineering & Materials Science