Conformal perovskite films on 100 cm2 textured silicon surface using two-step vacuum process

Jae Keun Hwang, Sang Won Lee, Wonkyu Lee, Soohyun Bae, Kyungjin Cho, Seongtak Kim, Solhee Lee, Ji Yeon Hyun, Yoonmook Kang, Hae Seok Lee, Donghwan Kim

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Abstract

In this study, perovskite thin films (PFs) were conformally deposited on 100 cm2 textured silicon substrates using a two-step vacuum process. The PFs were fabricated by converting thin films of a sputtered-PbO precursor using the chemical vapor deposition process. The conversion of PbO thin films into PFs was confirmed by X-ray diffractometry. The uniformity of reflectance and thickness was higher than 86% and 92%, respectively, on 100 cm2 textured substrate. We applied methylammonium vapor treatment for complete conversion without residual layer and the power conversion efficiency was 10.2% on a glass/FTO/TiO2/MAPbI3/Spiro-MeOTAD/Au structure.

Original languageEnglish
Article number137694
JournalThin Solid Films
Volume693
DOIs
Publication statusPublished - 2020 Jan 1

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Keywords

  • Chemical vapor deposition
  • Large area
  • Perovskite solar cells
  • Sputtering
  • Textured silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Hwang, J. K., Lee, S. W., Lee, W., Bae, S., Cho, K., Kim, S., Lee, S., Hyun, J. Y., Kang, Y., Lee, H. S., & Kim, D. (2020). Conformal perovskite films on 100 cm2 textured silicon surface using two-step vacuum process. Thin Solid Films, 693, [137694]. https://doi.org/10.1016/j.tsf.2019.137694