Constant growth of V-groove AlGaAs/GaAs multilayers on submicron gratings for complex optical devices

Chang Sik Son, Tae Geun Kim, Xue Lun Wang, Mutsuo Ogura

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

We have developed a new way of the constant growth technique to conserve a grating height of vertical-stacked V-groove AlGaAs/GaAs multilayer on submicron gratings up to 1.5 μm thickness by a low-pressure metalorganic chemical vapor deposition. The V-shaped GaAs buffer, grown on thermally deformed submicron gratings, has an important role in overcoming mass transport effects by recovering the deformed grating profile from sinusoidal to V-shaped. The low AlAs mole fraction is favorable to preserve the grating height up to a greater thickness. The constant growth technique is an important step to realize complex optoelectronic devices such as one-step grown distributed feedback lasers and two-dimensional photonic crystals.

Original languageEnglish
Pages (from-to)201-207
Number of pages7
JournalJournal of Crystal Growth
Volume221
Issue number1-4
DOIs
Publication statusPublished - 2000 Dec
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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