Contact angle evaluation for laser cleaning efficiency

J. Y. Baek, H. Jeong, M. H. Lee, J. D. Song, S. B. Kim, K. W. Lee, G. S. Kim, Sung Hyun Kim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A laser cleaning technique using an excimer laser is introduced to remove the photoresist on a Si wafer surface and its cleaning characteristics have been investigated. To analyse the cleaning efficiency quantitatively, a scanning electronic microscope, energy dispersive spectroscope, surface scanner and contact angle measurement were employed. Among these methods, it was confirmed experimentally that the contact angle measurement could be applicable to analyse the laser cleaning efficiency effectively owing to its speed of measurement and low measurement cost.

Original languageEnglish
Pages (from-to)553-554
Number of pages2
JournalElectronics Letters
Volume45
Issue number11
DOIs
Publication statusPublished - 2009 Jun 8

Fingerprint

Contact angle
Cleaning
Lasers
Angle measurement
Excimer lasers
Photoresists
Microscopes
Scanning
Costs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Baek, J. Y., Jeong, H., Lee, M. H., Song, J. D., Kim, S. B., Lee, K. W., ... Kim, S. H. (2009). Contact angle evaluation for laser cleaning efficiency. Electronics Letters, 45(11), 553-554. https://doi.org/10.1049/el.2009.0569

Contact angle evaluation for laser cleaning efficiency. / Baek, J. Y.; Jeong, H.; Lee, M. H.; Song, J. D.; Kim, S. B.; Lee, K. W.; Kim, G. S.; Kim, Sung Hyun.

In: Electronics Letters, Vol. 45, No. 11, 08.06.2009, p. 553-554.

Research output: Contribution to journalArticle

Baek, JY, Jeong, H, Lee, MH, Song, JD, Kim, SB, Lee, KW, Kim, GS & Kim, SH 2009, 'Contact angle evaluation for laser cleaning efficiency', Electronics Letters, vol. 45, no. 11, pp. 553-554. https://doi.org/10.1049/el.2009.0569
Baek JY, Jeong H, Lee MH, Song JD, Kim SB, Lee KW et al. Contact angle evaluation for laser cleaning efficiency. Electronics Letters. 2009 Jun 8;45(11):553-554. https://doi.org/10.1049/el.2009.0569
Baek, J. Y. ; Jeong, H. ; Lee, M. H. ; Song, J. D. ; Kim, S. B. ; Lee, K. W. ; Kim, G. S. ; Kim, Sung Hyun. / Contact angle evaluation for laser cleaning efficiency. In: Electronics Letters. 2009 ; Vol. 45, No. 11. pp. 553-554.
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