Correlation between photoluminescence and Fourier transform infrared spectra in tetra-ethyl-ortho-silicate thin films

Won Chel Choi, Tae Geun Kim, Jin Sang Kim

Research output: Contribution to journalArticle

Abstract

We report strong visible photoluminescence (PL) from thermally treated tetra-ethyl-ortho-silicate (TEOS) thin films at room temperature. High-resolution transmission electron microscope (HRTEM) studies showed that the PL originated from nanocrystalline-Si (nc-Si). HRTEM images showed that as-grown TEOS thin films had quasi-static amorphous (QSA) SiO2 phases instead of the typical amorphous (TA) SiO2 phases, and that they divided into small pieces of nc-Si after thermal treatment. In addition, Fourier transform infrared (FTIR) investigations showed that the QSA-SiO2 phases were composed of three types of bonding modes (i.e., Si-O-Si bending, Si-O bending, and Si-O-Si stretching), which play important roles in the formation of the nc-Si at relatively lower annealing temperatures.

Original languageEnglish
Pages (from-to)1150-1153
Number of pages4
JournalNanotechnology
Volume17
Issue number4
DOIs
Publication statusPublished - 2006 Feb 28

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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