Correlation between the microstructures and the cycling performance of RuO2 electrodes for thin-film microsupercapacitors

Han Ki Kim; Tae Yeon Seong; Jae Hong Lim; Young Woo Ok; Won Il Cho; Young Hwa Shin; Young Soo Yoon

doi:10.1116/1.1500752

Correlation between the microstructures and the cycling performance of RuO₂ electrodes for thin-film microsupercapacitors

Han Ki Kim, Tae Yeon Seong, Jae Hong Lim, Young Woo Ok, Won Il Cho, Young Hwa Shin, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

All solid-state thin-film supercapacitors (TFSCs) were fabricated using RuO₂ electrodes grown at oxygen gas flow ratios of 10% and 30%. Room-temperature charge-discharge measurements of the RuO₂/LiPON/RuO₂ TFSCs showed that after one cycle, the specific capacitances per volume were 30.6 and 23.5 mF/cm² μm for the 10% and 30% TFSCs, respectively. It was shown that as the cycle number increased, the capacitance of the 10% TFSC was degraded rapidly, while that of the 30% TFSC was degraded slowly.

Original language	English
Pages (from-to)	1827-1832
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	5
DOIs	https://doi.org/10.1116/1.1500752
Publication status	Published - 2002 Sept
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1500752

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Correlation between the microstructures and the cycling performance of RuO₂ electrodes for thin-film microsupercapacitors. / Kim, Han Ki; Seong, Tae Yeon; Lim, Jae Hong et al.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 20, No. 5, 09.2002, p. 1827-1832.

Research output: Contribution to journal › Article › peer-review

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abstract = "All solid-state thin-film supercapacitors (TFSCs) were fabricated using RuO2 electrodes grown at oxygen gas flow ratios of 10% and 30%. Room-temperature charge-discharge measurements of the RuO2/LiPON/RuO2 TFSCs showed that after one cycle, the specific capacitances per volume were 30.6 and 23.5 mF/cm2 μm for the 10% and 30% TFSCs, respectively. It was shown that as the cycle number increased, the capacitance of the 10% TFSC was degraded rapidly, while that of the 30% TFSC was degraded slowly.",

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AU - Kim, Han Ki

AU - Seong, Tae Yeon

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AU - Ok, Young Woo

AU - Cho, Won Il

AU - Shin, Young Hwa

AU - Yoon, Young Soo

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AB - All solid-state thin-film supercapacitors (TFSCs) were fabricated using RuO2 electrodes grown at oxygen gas flow ratios of 10% and 30%. Room-temperature charge-discharge measurements of the RuO2/LiPON/RuO2 TFSCs showed that after one cycle, the specific capacitances per volume were 30.6 and 23.5 mF/cm2 μm for the 10% and 30% TFSCs, respectively. It was shown that as the cycle number increased, the capacitance of the 10% TFSC was degraded rapidly, while that of the 30% TFSC was degraded slowly.

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Correlation between the microstructures and the cycling performance of RuO₂ electrodes for thin-film microsupercapacitors

Abstract

ASJC Scopus subject areas

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