All solid-state thin-film supercapacitors (TFSCs) were fabricated using RuO2 electrodes grown at oxygen gas flow ratios of 10% and 30%. Room-temperature charge-discharge measurements of the RuO2/LiPON/RuO2 TFSCs showed that after one cycle, the specific capacitances per volume were 30.6 and 23.5 mF/cm2 μm for the 10% and 30% TFSCs, respectively. It was shown that as the cycle number increased, the capacitance of the 10% TFSC was degraded rapidly, while that of the 30% TFSC was degraded slowly.
|Number of pages||6|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2002 Sep|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering