Correlation between the microstructures and the cycling performance of RuO2 electrodes for thin-film microsupercapacitors

Han Ki Kim, Tae Yeon Seong, Jae Hong Lim, Young Woo Ok, Won Il Cho, Young Hwa Shin, Young Soo Yoon

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

All solid-state thin-film supercapacitors (TFSCs) were fabricated using RuO2 electrodes grown at oxygen gas flow ratios of 10% and 30%. Room-temperature charge-discharge measurements of the RuO2/LiPON/RuO2 TFSCs showed that after one cycle, the specific capacitances per volume were 30.6 and 23.5 mF/cm2 μm for the 10% and 30% TFSCs, respectively. It was shown that as the cycle number increased, the capacitance of the 10% TFSC was degraded rapidly, while that of the 30% TFSC was degraded slowly.

Original languageEnglish
Pages (from-to)1827-1832
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number5
DOIs
Publication statusPublished - 2002 Sep 1
Externally publishedYes

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electrochemical capacitors
Thin films
microstructure
Microstructure
cycles
Electrodes
electrodes
thin films
Capacitance
capacitance
gas flow
Flow of gases
Supercapacitor
solid state
Oxygen
room temperature
oxygen
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Correlation between the microstructures and the cycling performance of RuO2 electrodes for thin-film microsupercapacitors. / Kim, Han Ki; Seong, Tae Yeon; Lim, Jae Hong; Ok, Young Woo; Cho, Won Il; Shin, Young Hwa; Yoon, Young Soo.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 20, No. 5, 01.09.2002, p. 1827-1832.

Research output: Contribution to journalArticle

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AU - Shin, Young Hwa

AU - Yoon, Young Soo

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