Correlation between the microstructures and the cycling performance of RuO2 electrodes for thin-film microsupercapacitors

Han Ki Kim, Tae Yeon Seong, Jae Hong Lim, Young Woo Ok, Won Il Cho, Young Hwa Shin, Young Soo Yoon

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


All solid-state thin-film supercapacitors (TFSCs) were fabricated using RuO2 electrodes grown at oxygen gas flow ratios of 10% and 30%. Room-temperature charge-discharge measurements of the RuO2/LiPON/RuO2 TFSCs showed that after one cycle, the specific capacitances per volume were 30.6 and 23.5 mF/cm2 μm for the 10% and 30% TFSCs, respectively. It was shown that as the cycle number increased, the capacitance of the 10% TFSC was degraded rapidly, while that of the 30% TFSC was degraded slowly.

Original languageEnglish
Pages (from-to)1827-1832
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number5
Publication statusPublished - 2002 Sep
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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