Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET

Kookjin Lee, Yeonsu Kim, Hyebin Lee, Sojeong Park, Yongwoo Lee, Min Kyu Joo, Hyunjin Ji, Jaewoo Lee, Jungu Chun, Moonsoo Sung, Young Hoon Cho, Doyoon Kim, Junhee Choi, Jae Woo Lee, Dae Young Jeon, Sung Jin Choi, Gyu Tae Kim

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