Dependence of photoluminescence of Bi-doped Y2O3 phosphor thin films on oxygen content in the sputtering atmosphere

Hee Bum Lee, Seong Il Kim, Jong Heun Lee, Young Hwan Kim

Research output: Contribution to journalArticle

Abstract

Photoluminescence (PL) emission properties of Bi-doped Y2O3 (Bi:Y2O3) phosphor thin films were investigated depending on the oxygen content in the sputtering atmosphere to find out the optimal oxygen content for obtaining Bi:Y2O3 phosphor thin film with strong PL emission intensity. PL emission intensity was greatly increased by adding a small amount of oxygen to the sputtering atmosphere. However, it was gradually decreased with further increasing the oxygen content. This behavior is thought to be due to the variation of crystallinity and surface roughness of the film depending on the oxygen content in the sputtering atmosphere. The film crystallinity showed similar behavior to PL emission intensity and the surface roughness except the case of Ar only was also decreased gradually with increasing the oxygen content. Density of point defects such as oxygen vacancy and interstitial in the film was expected to be changed according to the oxygen content in the sputtering atmosphere and also this change was considered to have an effect on the PL emission intensity of the Bi:Y2O3 film. In this work, Bi:Y2O3 phosphor thin film with the strongest PL emission intensity could be fabricated with the oxygen content of 10% in the sputtering atmosphere.

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalThin Solid Films
Volume650
DOIs
Publication statusPublished - 2018 Mar 31

Fingerprint

Phosphors
phosphors
Sputtering
Photoluminescence
sputtering
Oxygen
photoluminescence
atmospheres
Thin films
oxygen
thin films
Surface roughness
crystallinity
surface roughness
Point defects
Oxygen vacancies
point defects
interstitials
roughness

Keywords

  • Bismuth-doped yttrium trioxide
  • Crystallinity
  • Oxygen feed gas
  • Phosphors
  • Photoluminescence
  • Sputtering
  • Surface roughness
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Dependence of photoluminescence of Bi-doped Y2O3 phosphor thin films on oxygen content in the sputtering atmosphere. / Lee, Hee Bum; Kim, Seong Il; Lee, Jong Heun; Kim, Young Hwan.

In: Thin Solid Films, Vol. 650, 31.03.2018, p. 1-6.

Research output: Contribution to journalArticle

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