Deposition of LiNbO3 thin films for selective etching

Hyun Jun Kim, Dal Young Kim, Jong Yoon Ha, Chong Yun Kang, Man Young Sung, Bong Hee Cho, Seok Jin Yoon, Hyun Jai Kim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).

Original languageEnglish
Pages (from-to)933-935
Number of pages3
JournalJournal of Electroceramics
Volume17
Issue number2-4
DOIs
Publication statusPublished - 2006 Dec

Keywords

  • Ferroelectric
  • LiNbO
  • PLD
  • Selective etching

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering
  • Materials Chemistry

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  • Cite this

    Kim, H. J., Kim, D. Y., Ha, J. Y., Kang, C. Y., Sung, M. Y., Cho, B. H., Yoon, S. J., & Kim, H. J. (2006). Deposition of LiNbO3 thin films for selective etching. Journal of Electroceramics, 17(2-4), 933-935. https://doi.org/10.1007/s10832-006-0467-z