Deposition of LiNbO3 thin films for selective etching

Hyun Jun Kim, Dal Young Kim, Jong Yoon Ha, Chong-Yun Kang, Man Young Sung, Bong Hee Cho, Seok Jin Yoon, Hyun Jai Kim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).

Original languageEnglish
Pages (from-to)933-935
Number of pages3
JournalJournal of Electroceramics
Volume17
Issue number2-4
DOIs
Publication statusPublished - 2006 Dec 1

Fingerprint

Etching
etching
Thin films
thin films
Pulsed laser deposition
lithium niobates
Sapphire
Diamond
Ferroelectric materials
pulsed laser deposition
Aluminum Oxide
Diamonds
sapphire
Lithium
Electron microscopes
electron microscopes
diamonds
Scanning
scanning
Substrates

Keywords

  • Ferroelectric
  • LiNbO
  • PLD
  • Selective etching

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Kim, H. J., Kim, D. Y., Ha, J. Y., Kang, C-Y., Sung, M. Y., Cho, B. H., ... Kim, H. J. (2006). Deposition of LiNbO3 thin films for selective etching. Journal of Electroceramics, 17(2-4), 933-935. https://doi.org/10.1007/s10832-006-0467-z

Deposition of LiNbO3 thin films for selective etching. / Kim, Hyun Jun; Kim, Dal Young; Ha, Jong Yoon; Kang, Chong-Yun; Sung, Man Young; Cho, Bong Hee; Yoon, Seok Jin; Kim, Hyun Jai.

In: Journal of Electroceramics, Vol. 17, No. 2-4, 01.12.2006, p. 933-935.

Research output: Contribution to journalArticle

Kim, HJ, Kim, DY, Ha, JY, Kang, C-Y, Sung, MY, Cho, BH, Yoon, SJ & Kim, HJ 2006, 'Deposition of LiNbO3 thin films for selective etching', Journal of Electroceramics, vol. 17, no. 2-4, pp. 933-935. https://doi.org/10.1007/s10832-006-0467-z
Kim, Hyun Jun ; Kim, Dal Young ; Ha, Jong Yoon ; Kang, Chong-Yun ; Sung, Man Young ; Cho, Bong Hee ; Yoon, Seok Jin ; Kim, Hyun Jai. / Deposition of LiNbO3 thin films for selective etching. In: Journal of Electroceramics. 2006 ; Vol. 17, No. 2-4. pp. 933-935.
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