Design and analysis of surface micromachined two-axes silicon yaw rate sensor

Seungoh Han, James Jungho Pak

Research output: Contribution to journalConference articlepeer-review


In this paper, the design and the fabrication of a two-axes polysilicon yaw rate sensor with four vibrating masses are presented. To confirm the first mode of the designed yaw rate sensor, ANSYS simulation was performed and the resonant frequency of 28.263kHz was obtained. Due to process variations, the fabricated structure may have different resonant frequencies for reference and detection vibrations. Therefore, a simple frequency tuning structure was utilized for frequency matching. To drive the designed structure at optimum condition, Q factor was chosen to be 1000 and the driving voltage was set to 26V for one set of masses and 35 V for the other set of masses. With the selected driving condition, the reference vibration amplitude would result in about 10μ for all masses. Input angular rate of 90deg/sec would vibrate big masses and small masses with the amplitude of 0.17μ and 0.09μ, respectively. In the fabrication of the designed yaw rate sensor, 6μ thick LPCVD polysilicon was used as structural layer over phosphosilica glass(PSG) sacrificial layer. Polysilicon structural layer was doped with phosphorous diffused from PSG. The patterned structure was released by sublimation drying method using p-dichlorobenzene(p-DCB). The total area of the fabricated yaw rate sensor is about 1.9 × 1, 4mm2.

Original languageEnglish
Pages (from-to)124-131
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1997
EventSmart Electronics and MEMS - Adelaide, SA, Australia
Duration: 1997 Dec 111997 Dec 11


  • Gyroscope
  • MEMS
  • Polysilicon
  • Surface micromachining
  • Yaw rate sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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