Design and batch-fabrication of diamond thermocouple probes for the quantitative thermopower profiling of silicon IC devices

Byeonghee Lee, Kyeongtae Kim, Seungkoo Lee, Ohmyoung Kwon, Jong Hoon Kim, Dae Soon Lim, Woo Il Lee, Joon Sik Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Chemical Compounds