Design and fabrication of a micromechanical inverter

Kyoung Soo Chae, Seungoh Han, Minseok Song, Sung Moon, James Jungho Pak

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes, the movable electrode is pulled by an electrostatic force between the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 μm-thick poly-Si and the measured threshold voltage for ON/OFF switching was 23 V.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages508-514
Number of pages7
Volume4174
DOIs
Publication statusPublished - 2000
EventMicromachining and Microfabrication Process Technology VI - Santa Clara, CA, USA
Duration: 2000 Dec 182000 Dec 20

Other

OtherMicromachining and Microfabrication Process Technology VI
CitySanta Clara, CA, USA
Period00/12/1800/12/20

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Chae, K. S., Han, S., Song, M., Moon, S., & Pak, J. J. (2000). Design and fabrication of a micromechanical inverter. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4174, pp. 508-514). Society of Photo-Optical Instrumentation Engineers. https://doi.org/10.1117/12.396471