Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors

Dong Hyun Kim, Yong Chul Park, Seungho Park, Ohmyoung Kwon, Young Ki Choi, Joon Sik Lee

Research output: Contribution to journalArticlepeer-review

Abstract

Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2 and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about 11° at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over 20 ° at the same applied voltage.

Original languageEnglish
Pages (from-to)803-810
Number of pages8
JournalTransactions of the Korean Society of Mechanical Engineers, B
Volume33
Issue number10
DOIs
Publication statusPublished - 2009 Oct

Keywords

  • Micromirror
  • Thermal Actuator
  • Twisting-Type

ASJC Scopus subject areas

  • Mechanical Engineering

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