Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors

Dong Hyun Kim, Seungho Park, Ohmyoung Kwon, Young Ki Choi, Joon Sik Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo- mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2and gold thin-film layers. A simplified analytical model has been built to optimize the performance 3f micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code.

Original languageEnglish
Title of host publicationProceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Pages373-375
Number of pages3
DOIs
Publication statusPublished - 2010 Jul 12
EventASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 - Shanghai, China
Duration: 2009 Dec 182009 Dec 21

Publication series

NameProceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
Volume2

Other

OtherASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
CountryChina
CityShanghai
Period09/12/1809/12/21

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Keywords

  • Bimorph thermal actuator
  • MEMS fabrication
  • Micromirror
  • Twisting actuation

ASJC Scopus subject areas

  • Fluid Flow and Transfer Processes

Cite this

Kim, D. H., Park, S., Kwon, O., Choi, Y. K., & Lee, J. S. (2010). Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors. In Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 (pp. 373-375). (Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009; Vol. 2). https://doi.org/10.1115/MNHMT2009-18038