Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip

Si Jong Kim, Hong Joo Song, Jun Ho Lee, Cheong Hyun Roh, Hong Goo Choi, Cheol Koo Hahn, Tae Geun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Monolithic integrated optical array sensor is designed and fabricated. This array sensor is composed of vertical-cavity surface-emitting laser (VCSEL) and resonant cavity enhanced (RCE) photodiode. After the single chip is packaged, VCSEL and RCE photodiode are characterized independently. The VCSEL's optical power of 0.3mW is achieved at 30mA with peak wavelength of 781nm. The full width at half-maximum (FWHM) of 1nm is achieved at 30mA. The RCE photodiode's responsivity of 0.92A/W is achieved at 780nm.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages109-110
Number of pages2
DOIs
Publication statusPublished - 2009
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: 2009 Aug 172009 Aug 20

Publication series

Name2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period09/8/1709/8/20

Keywords

  • Fluorescence detection
  • Monolithic integrated optical sensor
  • Optical array sensor

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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    Kim, S. J., Song, H. J., Lee, J. H., Roh, C. H., Choi, H. G., Hahn, C. K., & Kim, T. G. (2009). Design and fabrication of monolithic integrated optical array sensor and characterization of its single chip. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 109-110). [5338535] (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). https://doi.org/10.1109/OMEMS.2009.5338535