Design of a multi-walled carbon nanotubes vacuum gauge

Ki Young Dong, Youngmin Park, Seung Il Moon, Jinwoo Lee, Jinnil Choi, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Measurements of the variation of vacuum level inside of field emission device when electron is emitted from carbon nanotubes (CNT) by electric field were performed. Multi-walled carbon nanotubes (MWCNT) sensor packaged with a vacuum device is used to measure the degree of a vacuum until the end of the vacuum device life. It was found that the electrical properties of MWCNTs altered with the degree of a vacuum. We fabricated MWCNT sensors which were printed and pasted by the screen printer. In this article, we report the successful detection of the ionization of gases in vacuum state.

Original languageEnglish
Title of host publication4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages609-611
Number of pages3
DOIs
Publication statusPublished - 2009
Event4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
Duration: 2009 Jan 52009 Jan 8

Publication series

Name4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Other

Other4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
CountryChina
CityShenzhen
Period09/1/509/1/8

Keywords

  • Field emission
  • Multi-walled carbon nanotues
  • Sensor
  • Vacuum gauge

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Dong, K. Y., Park, Y., Moon, S. I., Lee, J., Choi, J., & Ju, B. K. (2009). Design of a multi-walled carbon nanotubes vacuum gauge. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (pp. 609-611). [5068654] (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068654