Design principle of super resolution near-field structure using thermally responsive optical phase change materials for nanolithography applications

Gwanwoo Park, Jinhyung Lee, Sunggu Kang, Minsoo Kim, Shinill Kang, Wonjoon Choi

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Design principle of super resolution near-field structure using thermally responsive optical phase change materials for nanolithography applications'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds