Detection of CO and NH3 mixed gas using single-walled carbon nanotubes

Ki Young Dong; Jinwoo Lee; Dae Jin Ham; Jinil Choi; In Sung Hwang; Jong Heun Lee; Hyang Hee Choi; Byeong Kwon Ju

doi:10.1109/INEC.2010.5424641

Detection of CO and NH₃ mixed gas using single-walled carbon nanotubes

Ki Young Dong, Jinwoo Lee, Dae Jin Ham, Jinil Choi, In Sung Hwang, Jong Heun Lee, Hyang Hee Choi, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We fabricated a carbon nanotube based gas sensor for the detection of CO and NH₃ mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate(SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon nanotubes were carefully dropped over the window areas and dried at 220°C over a hot plate. Then, the photoresist was removed using acetone. CO and NH₃ mixed gas was delivered into a chamber at room temperature with nitrogen as a carrier gas. For comparison, each gas was applied to our sensor separately. Electrical resistance was measured for sensing performance.

Original language	English
Title of host publication	INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
Pages	676-677
Number of pages	2
DOIs	https://doi.org/10.1109/INEC.2010.5424641
Publication status	Published - 2010
Event	2010 3rd International Nanoelectronics Conference, INEC 2010 - Hongkong, China Duration: 2010 Jan 3 → 2010 Jan 8

Publication series

Name	INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

Other

Other	2010 3rd International Nanoelectronics Conference, INEC 2010
Country/Territory	China
City	Hongkong
Period	10/1/3 → 10/1/8

Keywords

CO
Gas sensor
MEMS
NH
Single-walled carbon nanotues

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/INEC.2010.5424641

Cite this

Dong, K. Y., Lee, J., Ham, D. J., Choi, J., Hwang, I. S., Lee, J. H., Choi, H. H., & Ju, B. K. (2010). Detection of CO and NH₃ mixed gas using single-walled carbon nanotubes. In INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings (pp. 676-677). [5424641] (INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings). https://doi.org/10.1109/INEC.2010.5424641

Detection of CO and NH₃ mixed gas using single-walled carbon nanotubes. / Dong, Ki Young; Lee, Jinwoo; Ham, Dae Jin et al.

INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. 2010. p. 676-677 5424641 (INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Dong, KY, Lee, J, Ham, DJ, Choi, J, Hwang, IS, Lee, JH, Choi, HH & Ju, BK 2010, Detection of CO and NH₃ mixed gas using single-walled carbon nanotubes. in INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings., 5424641, INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings, pp. 676-677, 2010 3rd International Nanoelectronics Conference, INEC 2010, Hongkong, China, 10/1/3. https://doi.org/10.1109/INEC.2010.5424641

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abstract = "We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate(SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon nanotubes were carefully dropped over the window areas and dried at 220°C over a hot plate. Then, the photoresist was removed using acetone. CO and NH3 mixed gas was delivered into a chamber at room temperature with nitrogen as a carrier gas. For comparison, each gas was applied to our sensor separately. Electrical resistance was measured for sensing performance.",

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