Detection of CO and NH3 mixed gas using single-walled carbon nanotubes

Ki Young Dong, Jinwoo Lee, Dae Jin Ham, Jinil Choi, In Sung Hwang, Jong Heun Lee, Hyang Hee Choi, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate(SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon nanotubes were carefully dropped over the window areas and dried at 220°C over a hot plate. Then, the photoresist was removed using acetone. CO and NH3 mixed gas was delivered into a chamber at room temperature with nitrogen as a carrier gas. For comparison, each gas was applied to our sensor separately. Electrical resistance was measured for sensing performance.

Original languageEnglish
Title of host publicationINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
Pages676-677
Number of pages2
DOIs
Publication statusPublished - 2010 May 5
Event2010 3rd International Nanoelectronics Conference, INEC 2010 - Hongkong, China
Duration: 2010 Jan 32010 Jan 8

Other

Other2010 3rd International Nanoelectronics Conference, INEC 2010
CountryChina
CityHongkong
Period10/1/310/1/8

Fingerprint

Single-walled carbon nanotubes (SWCN)
Photoresists
Gases
Carbon nanotubes
Acoustic impedance
Sensors
Sodium dodecyl sulfate
Photolithography
Chemical sensors
Acetone
Nitrogen
Fabrication
Electrodes
Temperature

Keywords

  • CO
  • Gas sensor
  • MEMS
  • NH
  • Single-walled carbon nanotues

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Dong, K. Y., Lee, J., Ham, D. J., Choi, J., Hwang, I. S., Lee, J. H., ... Ju, B. K. (2010). Detection of CO and NH3 mixed gas using single-walled carbon nanotubes. In INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings (pp. 676-677). [5424641] https://doi.org/10.1109/INEC.2010.5424641

Detection of CO and NH3 mixed gas using single-walled carbon nanotubes. / Dong, Ki Young; Lee, Jinwoo; Ham, Dae Jin; Choi, Jinil; Hwang, In Sung; Lee, Jong Heun; Choi, Hyang Hee; Ju, Byeong Kwon.

INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. 2010. p. 676-677 5424641.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dong, KY, Lee, J, Ham, DJ, Choi, J, Hwang, IS, Lee, JH, Choi, HH & Ju, BK 2010, Detection of CO and NH3 mixed gas using single-walled carbon nanotubes. in INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings., 5424641, pp. 676-677, 2010 3rd International Nanoelectronics Conference, INEC 2010, Hongkong, China, 10/1/3. https://doi.org/10.1109/INEC.2010.5424641
Dong KY, Lee J, Ham DJ, Choi J, Hwang IS, Lee JH et al. Detection of CO and NH3 mixed gas using single-walled carbon nanotubes. In INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. 2010. p. 676-677. 5424641 https://doi.org/10.1109/INEC.2010.5424641
Dong, Ki Young ; Lee, Jinwoo ; Ham, Dae Jin ; Choi, Jinil ; Hwang, In Sung ; Lee, Jong Heun ; Choi, Hyang Hee ; Ju, Byeong Kwon. / Detection of CO and NH3 mixed gas using single-walled carbon nanotubes. INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. 2010. pp. 676-677
@inproceedings{1618b0d507a64576b2772416b31f477a,
title = "Detection of CO and NH3 mixed gas using single-walled carbon nanotubes",
abstract = "We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate(SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon nanotubes were carefully dropped over the window areas and dried at 220°C over a hot plate. Then, the photoresist was removed using acetone. CO and NH3 mixed gas was delivered into a chamber at room temperature with nitrogen as a carrier gas. For comparison, each gas was applied to our sensor separately. Electrical resistance was measured for sensing performance.",
keywords = "CO, Gas sensor, MEMS, NH, Single-walled carbon nanotues",
author = "Dong, {Ki Young} and Jinwoo Lee and Ham, {Dae Jin} and Jinil Choi and Hwang, {In Sung} and Lee, {Jong Heun} and Choi, {Hyang Hee} and Ju, {Byeong Kwon}",
year = "2010",
month = "5",
day = "5",
doi = "10.1109/INEC.2010.5424641",
language = "English",
isbn = "9781424435449",
pages = "676--677",
booktitle = "INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings",

}

TY - GEN

T1 - Detection of CO and NH3 mixed gas using single-walled carbon nanotubes

AU - Dong, Ki Young

AU - Lee, Jinwoo

AU - Ham, Dae Jin

AU - Choi, Jinil

AU - Hwang, In Sung

AU - Lee, Jong Heun

AU - Choi, Hyang Hee

AU - Ju, Byeong Kwon

PY - 2010/5/5

Y1 - 2010/5/5

N2 - We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate(SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon nanotubes were carefully dropped over the window areas and dried at 220°C over a hot plate. Then, the photoresist was removed using acetone. CO and NH3 mixed gas was delivered into a chamber at room temperature with nitrogen as a carrier gas. For comparison, each gas was applied to our sensor separately. Electrical resistance was measured for sensing performance.

AB - We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate(SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon nanotubes were carefully dropped over the window areas and dried at 220°C over a hot plate. Then, the photoresist was removed using acetone. CO and NH3 mixed gas was delivered into a chamber at room temperature with nitrogen as a carrier gas. For comparison, each gas was applied to our sensor separately. Electrical resistance was measured for sensing performance.

KW - CO

KW - Gas sensor

KW - MEMS

KW - NH

KW - Single-walled carbon nanotues

UR - http://www.scopus.com/inward/record.url?scp=77951654585&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77951654585&partnerID=8YFLogxK

U2 - 10.1109/INEC.2010.5424641

DO - 10.1109/INEC.2010.5424641

M3 - Conference contribution

AN - SCOPUS:77951654585

SN - 9781424435449

SP - 676

EP - 677

BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

ER -