Detection of CO and NH3 mixed gas using single-walled carbon nanotubes

Ki Young Dong, Jinwoo Lee, Dae Jin Ham, Jinil Choi, In Sung Hwang, Jong Heun Lee, Hyang Hee Choi, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate(SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon nanotubes were carefully dropped over the window areas and dried at 220°C over a hot plate. Then, the photoresist was removed using acetone. CO and NH3 mixed gas was delivered into a chamber at room temperature with nitrogen as a carrier gas. For comparison, each gas was applied to our sensor separately. Electrical resistance was measured for sensing performance.

Original languageEnglish
Title of host publicationINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
Pages676-677
Number of pages2
DOIs
Publication statusPublished - 2010
Event2010 3rd International Nanoelectronics Conference, INEC 2010 - Hongkong, China
Duration: 2010 Jan 32010 Jan 8

Publication series

NameINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

Other

Other2010 3rd International Nanoelectronics Conference, INEC 2010
CountryChina
CityHongkong
Period10/1/310/1/8

Keywords

  • CO
  • Gas sensor
  • MEMS
  • NH
  • Single-walled carbon nanotues

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Dong, K. Y., Lee, J., Ham, D. J., Choi, J., Hwang, I. S., Lee, J. H., Choi, H. H., & Ju, B. K. (2010). Detection of CO and NH3 mixed gas using single-walled carbon nanotubes. In INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings (pp. 676-677). [5424641] (INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings). https://doi.org/10.1109/INEC.2010.5424641