Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers

Dong Won Chun, Kyo Seon Hwang, Kilho Eom, Jeong Hoon Lee, Byung Hak Cha, Woo Young Lee, Dae Sung Yoon, Tae Song Kim

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Through the use of oscillating microcantilevers, a micromechanical mass detection with a resolution of a Hz per picogram regime is reported. Through MEMS processes, piezoelectric microcantilevers that are simultaneously capable of self-actuation and the electrical measurement of resonant frequencies were fabricated. Mass detection in the Hz per picogram regime is demonstrated with a deposition of an Au thin-layer, of which the thickness is precisely controlled. In addition, it is shown that a scaling down of the microcantilevers enhances the sensitivity during the micromechanical mass detection.

Original languageEnglish
Pages (from-to)857-862
Number of pages6
JournalSensors and Actuators, A: Physical
Volume135
Issue number2
DOIs
Publication statusPublished - 2007 Apr 15
Externally publishedYes

Fingerprint

MEMS
Natural frequencies
actuation
electrical measurement
microelectromechanical systems
resonant frequencies
scaling
sensitivity

Keywords

  • Analytical sensitivity
  • Microcantilever
  • Micromechanical mass detection
  • Resonant frequency

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Chun, D. W., Hwang, K. S., Eom, K., Lee, J. H., Cha, B. H., Lee, W. Y., ... Kim, T. S. (2007). Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers. Sensors and Actuators, A: Physical, 135(2), 857-862. https://doi.org/10.1016/j.sna.2006.09.013

Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers. / Chun, Dong Won; Hwang, Kyo Seon; Eom, Kilho; Lee, Jeong Hoon; Cha, Byung Hak; Lee, Woo Young; Yoon, Dae Sung; Kim, Tae Song.

In: Sensors and Actuators, A: Physical, Vol. 135, No. 2, 15.04.2007, p. 857-862.

Research output: Contribution to journalArticle

Chun, Dong Won ; Hwang, Kyo Seon ; Eom, Kilho ; Lee, Jeong Hoon ; Cha, Byung Hak ; Lee, Woo Young ; Yoon, Dae Sung ; Kim, Tae Song. / Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers. In: Sensors and Actuators, A: Physical. 2007 ; Vol. 135, No. 2. pp. 857-862.
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