Development and electrical properties of (Ca0.7Sr0.3) (Zr0.8Ti0.2)O3 thin film applied to embedded decoupling capacitors

Seung Hwan Lee, Hong Ki Kim, Min Gyu Kang, Chong-Yun Kang, Sung Gap Lee, Young Hie Lee, Jung Rag Yoon

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A formed device embedded-type 0402 sized (Ca0.7Sr 0.3)(Zr0.8Ti0.2)O3 (CSZT) embedded capacitor was fabricated for use in embedded printed circuit board. The capacitance and dielectric loss of the CSZT embedded capacitor were 406.1 pF and 0.015, respectively, at 1 MHz. The CSZT embedded capacitor exhibits stable capacitance with varying applied voltage and C Zero G (-55 °C-125 °C, delta C/C = ±30 ppm/°C) properties. The measured values of equivalent series resistance and equivalent series inductance were 6.1 ω and 62.39 μH, respectively. The leakage current density was 0.78 μA/cm2 at 3 V of applied voltage. These electrical properties indicate that the CSZT embedded capacitor holds promise for use as an embedded passive capacitor.

Original languageEnglish
Article number6814281
Pages (from-to)777-779
Number of pages3
JournalIEEE Electron Device Letters
Volume35
Issue number7
DOIs
Publication statusPublished - 2014
Externally publishedYes

Fingerprint

Electric properties
Capacitors
Thin films
Capacitance
Electric potential
Dielectric losses
Leakage currents
Printed circuit boards
Inductance
Current density

Keywords

  • CSZT
  • embedded capacitor
  • FDE

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Lee, S. H., Kim, H. K., Kang, M. G., Kang, C-Y., Lee, S. G., Lee, Y. H., & Yoon, J. R. (2014). Development and electrical properties of (Ca0.7Sr0.3) (Zr0.8Ti0.2)O3 thin film applied to embedded decoupling capacitors. IEEE Electron Device Letters, 35(7), 777-779. [6814281]. https://doi.org/10.1109/LED.2014.2320295

Development and electrical properties of (Ca0.7Sr0.3) (Zr0.8Ti0.2)O3 thin film applied to embedded decoupling capacitors. / Lee, Seung Hwan; Kim, Hong Ki; Kang, Min Gyu; Kang, Chong-Yun; Lee, Sung Gap; Lee, Young Hie; Yoon, Jung Rag.

In: IEEE Electron Device Letters, Vol. 35, No. 7, 6814281, 2014, p. 777-779.

Research output: Contribution to journalArticle

Lee, Seung Hwan ; Kim, Hong Ki ; Kang, Min Gyu ; Kang, Chong-Yun ; Lee, Sung Gap ; Lee, Young Hie ; Yoon, Jung Rag. / Development and electrical properties of (Ca0.7Sr0.3) (Zr0.8Ti0.2)O3 thin film applied to embedded decoupling capacitors. In: IEEE Electron Device Letters. 2014 ; Vol. 35, No. 7. pp. 777-779.
@article{35531a82a149432f8481ddfcd830958c,
title = "Development and electrical properties of (Ca0.7Sr0.3) (Zr0.8Ti0.2)O3 thin film applied to embedded decoupling capacitors",
abstract = "A formed device embedded-type 0402 sized (Ca0.7Sr 0.3)(Zr0.8Ti0.2)O3 (CSZT) embedded capacitor was fabricated for use in embedded printed circuit board. The capacitance and dielectric loss of the CSZT embedded capacitor were 406.1 pF and 0.015, respectively, at 1 MHz. The CSZT embedded capacitor exhibits stable capacitance with varying applied voltage and C Zero G (-55 °C-125 °C, delta C/C = ±30 ppm/°C) properties. The measured values of equivalent series resistance and equivalent series inductance were 6.1 ω and 62.39 μH, respectively. The leakage current density was 0.78 μA/cm2 at 3 V of applied voltage. These electrical properties indicate that the CSZT embedded capacitor holds promise for use as an embedded passive capacitor.",
keywords = "CSZT, embedded capacitor, FDE",
author = "Lee, {Seung Hwan} and Kim, {Hong Ki} and Kang, {Min Gyu} and Chong-Yun Kang and Lee, {Sung Gap} and Lee, {Young Hie} and Yoon, {Jung Rag}",
year = "2014",
doi = "10.1109/LED.2014.2320295",
language = "English",
volume = "35",
pages = "777--779",
journal = "IEEE Electron Device Letters",
issn = "0741-3106",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "7",

}

TY - JOUR

T1 - Development and electrical properties of (Ca0.7Sr0.3) (Zr0.8Ti0.2)O3 thin film applied to embedded decoupling capacitors

AU - Lee, Seung Hwan

AU - Kim, Hong Ki

AU - Kang, Min Gyu

AU - Kang, Chong-Yun

AU - Lee, Sung Gap

AU - Lee, Young Hie

AU - Yoon, Jung Rag

PY - 2014

Y1 - 2014

N2 - A formed device embedded-type 0402 sized (Ca0.7Sr 0.3)(Zr0.8Ti0.2)O3 (CSZT) embedded capacitor was fabricated for use in embedded printed circuit board. The capacitance and dielectric loss of the CSZT embedded capacitor were 406.1 pF and 0.015, respectively, at 1 MHz. The CSZT embedded capacitor exhibits stable capacitance with varying applied voltage and C Zero G (-55 °C-125 °C, delta C/C = ±30 ppm/°C) properties. The measured values of equivalent series resistance and equivalent series inductance were 6.1 ω and 62.39 μH, respectively. The leakage current density was 0.78 μA/cm2 at 3 V of applied voltage. These electrical properties indicate that the CSZT embedded capacitor holds promise for use as an embedded passive capacitor.

AB - A formed device embedded-type 0402 sized (Ca0.7Sr 0.3)(Zr0.8Ti0.2)O3 (CSZT) embedded capacitor was fabricated for use in embedded printed circuit board. The capacitance and dielectric loss of the CSZT embedded capacitor were 406.1 pF and 0.015, respectively, at 1 MHz. The CSZT embedded capacitor exhibits stable capacitance with varying applied voltage and C Zero G (-55 °C-125 °C, delta C/C = ±30 ppm/°C) properties. The measured values of equivalent series resistance and equivalent series inductance were 6.1 ω and 62.39 μH, respectively. The leakage current density was 0.78 μA/cm2 at 3 V of applied voltage. These electrical properties indicate that the CSZT embedded capacitor holds promise for use as an embedded passive capacitor.

KW - CSZT

KW - embedded capacitor

KW - FDE

UR - http://www.scopus.com/inward/record.url?scp=84903618460&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84903618460&partnerID=8YFLogxK

U2 - 10.1109/LED.2014.2320295

DO - 10.1109/LED.2014.2320295

M3 - Article

VL - 35

SP - 777

EP - 779

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

SN - 0741-3106

IS - 7

M1 - 6814281

ER -