Development of a media actuator for probe-based data storage

K. I. Lee, J. W. Cho, M. H. Byun, Sung Hyun Kim, Y. J. Choi, J. K. Shin

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Nanoscale data bits can be written and read with micromachined scanning probe microscopy (SPM) probes. Since a large number of probes can be integrated on a single chip by micromachining batch process and operated simultaneously, probe-based data storage with small form factor can have very large data capacity and good data transfer rate compared with current mobile storages. One of barriers to realizing probe storage is to fabricate a reliable media actuator using micromachining process. In this paper, we report the microfabrication of an electromagnetic actuator and the results of evaluation test. The actuator consists of a media substrate, a silicon frame, four pairs of magnets, a spacer, and a printed circuit board (PCB). The silicon frame was fabricated with conventional micromachining process and the design of PCB was optimized to reduce power consumption during operation. The total size of device after integration is 17.3 × 17.3 × 0.8 mm3 while the media area is 12.8 × 12.8 mm2. The measured displacement of actuator is ±50 μm for input current of ±111 mA at the average power consumption of 24.4 mW and the resonance frequency is 69 Hz. The resolution of electromagnetic actuator was evaluated with conventional atomic force microscopy (AFM). From the images at a small scan range, we can conclude the resolution of the actuator is below 10 nm.

Original languageEnglish
JournalCurrent Applied Physics
Volume6
Issue numberSUPPL. 1
DOIs
Publication statusPublished - 2006 Aug 1
Externally publishedYes

Fingerprint

data storage
Actuators
actuators
Data storage equipment
probes
Micromachining
micromachining
printed circuits
circuit boards
Silicon
Printed circuit boards
Electric power utilization
electromagnetism
Data transfer rates
Scanning probe microscopy
Microfabrication
silicon
spacers
Magnets
form factors

Keywords

  • AFM
  • Data storage
  • Electromagnetic actuator
  • Probe
  • SPM

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Materials Science (miscellaneous)

Cite this

Development of a media actuator for probe-based data storage. / Lee, K. I.; Cho, J. W.; Byun, M. H.; Kim, Sung Hyun; Choi, Y. J.; Shin, J. K.

In: Current Applied Physics, Vol. 6, No. SUPPL. 1, 01.08.2006.

Research output: Contribution to journalArticle

Lee, K. I. ; Cho, J. W. ; Byun, M. H. ; Kim, Sung Hyun ; Choi, Y. J. ; Shin, J. K. / Development of a media actuator for probe-based data storage. In: Current Applied Physics. 2006 ; Vol. 6, No. SUPPL. 1.
@article{c8b483e5f1ad40eca846fe1221f05267,
title = "Development of a media actuator for probe-based data storage",
abstract = "Nanoscale data bits can be written and read with micromachined scanning probe microscopy (SPM) probes. Since a large number of probes can be integrated on a single chip by micromachining batch process and operated simultaneously, probe-based data storage with small form factor can have very large data capacity and good data transfer rate compared with current mobile storages. One of barriers to realizing probe storage is to fabricate a reliable media actuator using micromachining process. In this paper, we report the microfabrication of an electromagnetic actuator and the results of evaluation test. The actuator consists of a media substrate, a silicon frame, four pairs of magnets, a spacer, and a printed circuit board (PCB). The silicon frame was fabricated with conventional micromachining process and the design of PCB was optimized to reduce power consumption during operation. The total size of device after integration is 17.3 × 17.3 × 0.8 mm3 while the media area is 12.8 × 12.8 mm2. The measured displacement of actuator is ±50 μm for input current of ±111 mA at the average power consumption of 24.4 mW and the resonance frequency is 69 Hz. The resolution of electromagnetic actuator was evaluated with conventional atomic force microscopy (AFM). From the images at a small scan range, we can conclude the resolution of the actuator is below 10 nm.",
keywords = "AFM, Data storage, Electromagnetic actuator, Probe, SPM",
author = "Lee, {K. I.} and Cho, {J. W.} and Byun, {M. H.} and Kim, {Sung Hyun} and Choi, {Y. J.} and Shin, {J. K.}",
year = "2006",
month = "8",
day = "1",
doi = "10.1016/j.cap.2006.01.025",
language = "English",
volume = "6",
journal = "Current Applied Physics",
issn = "1567-1739",
publisher = "Elsevier",
number = "SUPPL. 1",

}

TY - JOUR

T1 - Development of a media actuator for probe-based data storage

AU - Lee, K. I.

AU - Cho, J. W.

AU - Byun, M. H.

AU - Kim, Sung Hyun

AU - Choi, Y. J.

AU - Shin, J. K.

PY - 2006/8/1

Y1 - 2006/8/1

N2 - Nanoscale data bits can be written and read with micromachined scanning probe microscopy (SPM) probes. Since a large number of probes can be integrated on a single chip by micromachining batch process and operated simultaneously, probe-based data storage with small form factor can have very large data capacity and good data transfer rate compared with current mobile storages. One of barriers to realizing probe storage is to fabricate a reliable media actuator using micromachining process. In this paper, we report the microfabrication of an electromagnetic actuator and the results of evaluation test. The actuator consists of a media substrate, a silicon frame, four pairs of magnets, a spacer, and a printed circuit board (PCB). The silicon frame was fabricated with conventional micromachining process and the design of PCB was optimized to reduce power consumption during operation. The total size of device after integration is 17.3 × 17.3 × 0.8 mm3 while the media area is 12.8 × 12.8 mm2. The measured displacement of actuator is ±50 μm for input current of ±111 mA at the average power consumption of 24.4 mW and the resonance frequency is 69 Hz. The resolution of electromagnetic actuator was evaluated with conventional atomic force microscopy (AFM). From the images at a small scan range, we can conclude the resolution of the actuator is below 10 nm.

AB - Nanoscale data bits can be written and read with micromachined scanning probe microscopy (SPM) probes. Since a large number of probes can be integrated on a single chip by micromachining batch process and operated simultaneously, probe-based data storage with small form factor can have very large data capacity and good data transfer rate compared with current mobile storages. One of barriers to realizing probe storage is to fabricate a reliable media actuator using micromachining process. In this paper, we report the microfabrication of an electromagnetic actuator and the results of evaluation test. The actuator consists of a media substrate, a silicon frame, four pairs of magnets, a spacer, and a printed circuit board (PCB). The silicon frame was fabricated with conventional micromachining process and the design of PCB was optimized to reduce power consumption during operation. The total size of device after integration is 17.3 × 17.3 × 0.8 mm3 while the media area is 12.8 × 12.8 mm2. The measured displacement of actuator is ±50 μm for input current of ±111 mA at the average power consumption of 24.4 mW and the resonance frequency is 69 Hz. The resolution of electromagnetic actuator was evaluated with conventional atomic force microscopy (AFM). From the images at a small scan range, we can conclude the resolution of the actuator is below 10 nm.

KW - AFM

KW - Data storage

KW - Electromagnetic actuator

KW - Probe

KW - SPM

UR - http://www.scopus.com/inward/record.url?scp=33746238914&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33746238914&partnerID=8YFLogxK

U2 - 10.1016/j.cap.2006.01.025

DO - 10.1016/j.cap.2006.01.025

M3 - Article

VL - 6

JO - Current Applied Physics

JF - Current Applied Physics

SN - 1567-1739

IS - SUPPL. 1

ER -