Development of automatic process control system with simulation in PECVD system

Youn Jin Kim, Hong Chul Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We develop the Automatic Process Control system to maximize the number of available process chambers by controlling the time to start cleaning each chamber. Firstly, to achieve the purpose we build the controller model which creates and changes the pseudo RPSC counter properly by controlling other factors: unit priority, robot sequence etc. Secondly, for testing the control system we design one of the representative PECVD systems, and experiment the simulated system with the APC system and without it under various conditions. Finally, we optimize the system with the Evolution Strategy. As a result, not only major performance indicators; cycle time and throughput but also the variations of them have improved than before adapting the system. The contribution of this research is to present the practical solution concerned with various and complex issues in the real world.

Original languageEnglish
Title of host publication2008 International Conference on Control, Automation and Systems, ICCAS 2008
Pages1475-1478
Number of pages4
DOIs
Publication statusPublished - 2008
Event2008 International Conference on Control, Automation and Systems, ICCAS 2008 - Seoul, Korea, Republic of
Duration: 2008 Oct 142008 Oct 17

Publication series

Name2008 International Conference on Control, Automation and Systems, ICCAS 2008

Other

Other2008 International Conference on Control, Automation and Systems, ICCAS 2008
CountryKorea, Republic of
CitySeoul
Period08/10/1408/10/17

Keywords

  • Automatic Process Control(APC)
  • PECVD
  • RPSC
  • Simulation
  • TFT-LCD

ASJC Scopus subject areas

  • Control and Systems Engineering

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