Abstract
A flexible tactile sensing module with NiCr strain gauges as sensing elements was fabricated by polymer MEMS technology using polyimide materials where the one was the photo-definable polyimide precursor and the other was nonphoto-definable. The unit sensor cell size of 32×32 tactile sensor array was 1mm × 1mm cell and its overall size was 5.5cm × 6.5cm. Especially, both the tactile sensor arrays and the pluggable terminals as flexible flat cable were fabricated on the same polymer substrate easily to be connected the sensor array with a PCB board. The fabricated tactile sensing module was measured continuously in the normal force range of 0∼1N with tactile sensor evaluation system. The value of resistance was relatively linear with normal force in the overall range of 0∼1N. However, the variation of resistance was decreased by more than 0.6N. The variation rate of resistance was 2.0%/N in the range of 0∼0.6N and 1.5%/N in the range of 0.6∼1N. Image display was identified corresponding by distribution of applied force. The flexibility of the sensing module was adequate to be placed on any curved surface as a cylinder.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 7269 |
| DOIs | |
| Publication status | Published - 2008 |
| Event | Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV - Melbourne, VIC, Australia Duration: 2008 Dec 10 → 2008 Dec 12 |
Other
| Other | Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV |
|---|---|
| Country | Australia |
| City | Melbourne, VIC |
| Period | 08/12/10 → 08/12/12 |
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Keywords
- Flexible flat cable
- Flexible tactile sensing module
- NiCr strain gauge
- Polyimide
- Polymer MEMS
ASJC Scopus subject areas
- Applied Mathematics
- Computer Science Applications
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
Cite this
Development of polyimide-based flexible tactile sensing module integrated with strain gauges & flexible flat cable. / Kim, Kunnyun; Lee, Kang Ryeol; Kim, Won Hyo; Park, Kwang Bum; Kim, Tae Hyung; Pak, James Jungho.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7269 2008. 72690P.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Development of polyimide-based flexible tactile sensing module integrated with strain gauges & flexible flat cable
AU - Kim, Kunnyun
AU - Lee, Kang Ryeol
AU - Kim, Won Hyo
AU - Park, Kwang Bum
AU - Kim, Tae Hyung
AU - Pak, James Jungho
PY - 2008
Y1 - 2008
N2 - A flexible tactile sensing module with NiCr strain gauges as sensing elements was fabricated by polymer MEMS technology using polyimide materials where the one was the photo-definable polyimide precursor and the other was nonphoto-definable. The unit sensor cell size of 32×32 tactile sensor array was 1mm × 1mm cell and its overall size was 5.5cm × 6.5cm. Especially, both the tactile sensor arrays and the pluggable terminals as flexible flat cable were fabricated on the same polymer substrate easily to be connected the sensor array with a PCB board. The fabricated tactile sensing module was measured continuously in the normal force range of 0∼1N with tactile sensor evaluation system. The value of resistance was relatively linear with normal force in the overall range of 0∼1N. However, the variation of resistance was decreased by more than 0.6N. The variation rate of resistance was 2.0%/N in the range of 0∼0.6N and 1.5%/N in the range of 0.6∼1N. Image display was identified corresponding by distribution of applied force. The flexibility of the sensing module was adequate to be placed on any curved surface as a cylinder.
AB - A flexible tactile sensing module with NiCr strain gauges as sensing elements was fabricated by polymer MEMS technology using polyimide materials where the one was the photo-definable polyimide precursor and the other was nonphoto-definable. The unit sensor cell size of 32×32 tactile sensor array was 1mm × 1mm cell and its overall size was 5.5cm × 6.5cm. Especially, both the tactile sensor arrays and the pluggable terminals as flexible flat cable were fabricated on the same polymer substrate easily to be connected the sensor array with a PCB board. The fabricated tactile sensing module was measured continuously in the normal force range of 0∼1N with tactile sensor evaluation system. The value of resistance was relatively linear with normal force in the overall range of 0∼1N. However, the variation of resistance was decreased by more than 0.6N. The variation rate of resistance was 2.0%/N in the range of 0∼0.6N and 1.5%/N in the range of 0.6∼1N. Image display was identified corresponding by distribution of applied force. The flexibility of the sensing module was adequate to be placed on any curved surface as a cylinder.
KW - Flexible flat cable
KW - Flexible tactile sensing module
KW - NiCr strain gauge
KW - Polyimide
KW - Polymer MEMS
UR - http://www.scopus.com/inward/record.url?scp=65549092606&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=65549092606&partnerID=8YFLogxK
U2 - 10.1117/12.820053
DO - 10.1117/12.820053
M3 - Conference contribution
AN - SCOPUS:65549092606
VL - 7269
BT - Proceedings of SPIE - The International Society for Optical Engineering
ER -