Abstract
A flexible tactile sensing module with NiCr strain gauges as sensing elements was fabricated by polymer MEMS technology using polyimide materials where the one was the photo-definable polyimide precursor and the other was nonphoto-definable. The unit sensor cell size of 32×32 tactile sensor array was 1mm × 1mm cell and its overall size was 5.5cm × 6.5cm. Especially, both the tactile sensor arrays and the pluggable terminals as flexible flat cable were fabricated on the same polymer substrate easily to be connected the sensor array with a PCB board. The fabricated tactile sensing module was measured continuously in the normal force range of 0∼1N with tactile sensor evaluation system. The value of resistance was relatively linear with normal force in the overall range of 0∼1N. However, the variation of resistance was decreased by more than 0.6N. The variation rate of resistance was 2.0%/N in the range of 0∼0.6N and 1.5%/N in the range of 0.6∼1N. Image display was identified corresponding by distribution of applied force. The flexibility of the sensing module was adequate to be placed on any curved surface as a cylinder.
Original language | English |
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Article number | 72690P |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 7269 |
DOIs | |
Publication status | Published - 2008 |
Event | Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV - Melbourne, VIC, Australia Duration: 2008 Dec 10 → 2008 Dec 12 |
Keywords
- Flexible flat cable
- Flexible tactile sensing module
- NiCr strain gauge
- Polyimide
- Polymer MEMS
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering