Development of the embedded capacitor with ceramic/resin hybrid films for LNA module

Ceramic-resin hybrid materials can be used as solutions to overcome the limitations of pure ceramic materials such as their high sintering temperature and no material compliancy. These hybrid materials have been applied to electronic components for 3-dimensional system integration, especially passive circuits that tend to be embedded into multilayered packages. In this study, low noise amplifier (LNA) module was fabricated with BaTiO₃-DCPBCy and Al₂O₃-DCPBCy hybrid films by an inkjet printing process. These inkjet-printed hybrid films were used as high-k and low-k dielectric layers for embedded capacitor and insulating layer, respectively. The dielectric properties of the inkjet-printed hybrid films were investigated in order to confirm their feasibilities as dielectric layers; in the case of the Al ₂O₃-DCPBCy hybrid film: ε_r≈6, tanδ<0.003, in the case of the BaTiO₃-DCPBCy hybrid film: ε_r≈49, tanδ<0.02. Furthermore, the LNA module represented small signal gain of 14.7-16 dB and noise figure of 4.5 dB at 77 GHz.